Method of fabricating a microresonator
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United States of America Patent
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-
May 31, 2011
Grant Date -
Aug 28, 2008
app pub date -
Feb 21, 2008
filing date -
Feb 27, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
A method of fabricating a microresonator is disclosed. Initially, silica is deposited on a substrate, and the substrate is etched to form a pillar, the top portion of which supports the silica. The microresonator is then formed from the silica. Next, the pillar is etched to reduce the overall diameter of the top portion of the pillar so that the microresonator can be disengaged from the pillar.
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