Wafer fixture for wet process applications
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United States of America Patent
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May 31, 2011
Grant Date -
Sep 23, 2010
app pub date -
Jan 15, 2010
filing date -
Jul 16, 2007
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention is a wafer fixture comprising a housing body, a thrust plate, a flexure clamp, gaskets, flexure pins on an inner circumference of the housing body, locking grooves on an outer circumference of the flexure clamp, and a handle. A wafer may be placed between the gaskets of the housing body and the thrust plate. The flexure clamp may be placed over the thrust plate and secured to the housing body by rotating the flexure clamp such that locking grooves of the fixture plate mate with the flexure pins on the inner circumference of the housing body. The present invention in yet another embodiment is a wafer etch tool comprising a housing, a flexure clamp, and means for securing a wafer between the housing and the flexure clamp upon rotation of the flexure clamp within the housing.
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