Active matrix electronic array device
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United States of America Patent
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May 31, 2011
Grant Date -
Nov 5, 2009
app pub date -
Jun 8, 2005
filing date -
Jun 19, 2004
priority date (Note) -
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Abstract
An active matrix device has an array (54) of device elements, each of which comprises at least one thin film transistor (34). A thin film conductive heater element arrangement (10) is provided over a substrate of the device, and the semiconductor islands of the thin film transistors are provided over the heater element arrangement (10). The heating arrangement can remain in place in the device, thereby avoiding the need to remove the layers of the heater element arrangement during processing.
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