US Patent No: 7,952,787

Number of patents in Portfolio can not be more than 2000

Method of manufacturing MEMS devices providing air gap control

ALSO PUBLISHED AS: 20090273823

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Abstract

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Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA687

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kogut, Lior Sunnyvale, CA 80 1217
Tung, Ming-Hau San Francisco, CA 121 2228

Cited Art Landscape

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2006/0262,126 Transparent thin films 45 2006
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2008/0121,503 Compatible MEMS switch architecture 1 2006
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2007/0177,247 Method and device for modulating light with multiple electrodes 83 2007
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2008/0013,145 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 54 2007
2008/0037,093 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 88 2007
2008/0088,904 Method and device for modulating light with semiconductor substrate 87 2007
2008/0088,910 SYSTEM AND METHOD FOR A MEMS DEVICE 90 2007
2008/0088,911 SYSTEM AND METHOD FOR A MEMS DEVICE 80 2007
2008/0088,912 SYSTEM AND METHOD FOR A MEMS DEVICE 87 2007
2008/0106,782 SYSTEM AND METHOD FOR A MEMS DEVICE 86 2007
7,492,503 System and method for multi-level brightness in interferometric modulation 37 2007
2008/0080,043 CONDUCTIVE BUS STRUCTURE FOR INTERFEROMETRIC MODULATOR ARRAY 54 2007
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2008/0112,035 METHODS AND DEVICES FOR INHIBITING TILTING OF A MOVABLE ELEMENT IN A MEMS DEVICE 45 2008
2008/0247,028 METHOD AND DEVICE FOR MULTISTATE INTERFEROMETRIC LIGHT MODULATION 42 2008
2009/0068,781 METHOD OF MANUFACTURE FOR MICROELECTROMECHANICAL DEVICES 49 2008
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2010/0039,370 METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF 46 2009
2009/0201,566 DEVICE HAVING A CONDUCTIVE LIGHT ABSORBING MASK AND METHOD FOR FABRICATING SAME 37 2009
2009/0213,450 SUPPORT STRUCTURES FOR ELECTROMECHANICAL SYSTEMS AND METHODS OF FABRICATING THE SAME 45 2009
2009/0279,162 PHOTONIC MEMS AND STRUCTURES 56 2009
2010/0080,890 APPARATUS AND METHOD FOR REDUCING SLIPPAGE BETWEEN STRUCTURES IN AN INTERFEROMETRIC MODULATOR 33 2009
2010/0085,626 APPARATUS AND METHOD FOR REDUCING SLIPPAGE BETWEEN STRUCTURES IN AN INTERFEROMETRIC MODULATOR 31 2009
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7,852,544 Separable modulator 49 2010
 
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* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (7)
8,963,159 Pixel via and methods of forming the same 0 2011
8,817,357 Mechanical layer and methods of forming the same 1 2011
8,659,816 Mechanical layer and methods of making the same 0 2011
8,797,632 Actuation and calibration of charge neutral electrode of a display device 0 2011
8,736,939 Matching layer thin-films for an electromechanical systems reflective display device 0 2011
8,964,280 Method of manufacturing MEMS devices providing air gap control 0 2012
8,693,084 Interferometric modulator in transmission mode 0 2012
* Cited By Examiner

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