Method of manufacturing MEMS devices providing air gap control

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7952787
APP PUB NO 20090273823A1
SERIAL NO

12436064

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
SNAPTRACK, INC.SAN JOSE, CA1479

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kogut, Lior Sunnyvale, US 45 1432
Tung, Ming-Hau San Francisco, US 77 2519

Cited Art Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (7)
4895500 Micromechanical non-reverse valve 61 1989
5091983 Optical modulation apparatus and measurement method 167 1989
5062689 Electrostatically actuatable light modulating device 215 1990
5315370 Interferometric modulator for optical signal processing 147 1991
6862127 High performance micromirror arrays and methods of manufacturing the same 70 2003
2006/0132,927 Electrowetting chromatophore 70 2005
2008/0068,697 Micro-Displays and Their Manufacture 39 2007
 
CHEETAH OMNI, LLC (1)
6407851 Micromechanical optical switch 201 2000
 
CADILLAC RUBBER & PLASTICS, INC. (1)
6983820 Noise and vibration suppressors 28 2002
 
SECRETARY OF STATE FOR DEFENCE, THE (1)
4779959 Liquid crystal electro-optic modulator in a fabry-perot interferometer 107 1987
 
ROLLTRONICS CORPORATION (1)
2005/0236,260 Micro-electromechanical switch array 10 2005
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (1)
6841081 Method for manufacturing reflective spatial light modulator mirror devices 98 2003
 
Rosemount Aerospace Inc. (1)
6046659 Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications 248 1998
 
ECHELLE, INC. (1)
5661592 Method of making and an apparatus for a flat diffraction grating light valve 252 1995
 
FUJI PHOTO FILM CO., LTD. (2)
6327071 Drive methods of array-type light modulation element and flat-panel display 277 1999
7046422 Reflection-type light modulating array element and exposure apparatus 107 2004
 
SAMSUNG ELECTRONICS CO., LTD. (2)
5699181 Deformable mirror device and manufacturing method thereof 83 1996
2006/0066,926 Color transforming device using brightness information of image and display device and the method thereof 26 2005
 
PANASONIC LIQUID CRYSTAL DISPLAY CO., LTD. (1)
2005/0179,378 Organic electroluminescent display device 105 2005
 
TRANSPACIFIC EXCHANGE, LLC (1)
6100861 Tiled flat panel display with improved color gamut 133 1998
 
NORTHEASTERN UNIVERSITY (1)
5638946 Micromechanical switch with insulated switch contact 414 1996
 
CAPELLA MICROSYSTEMS, CORP. (1)
2006/0180,886 Ambient light filter structure 48 2005
 
SKYWORKS SOLUTIONS, INC. (1)
5880921 Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology 170 1997
 
HOYA CORPORATION (1)
6353489 Optical retro-reflection device 16 2000
 
YAMAHA CORPORATION (1)
5795208 Manufacture of electron emitter by replica technique 38 1995
 
SONY SEMICONDUCTOR SOLUTIONS CORPORATION (1)
2004/0259,010 Solid-state imaging device 61 2004
 
MEMtronics, a division of Cogent Solutions, Inc. (1)
6608268 Proximity micro-electro-mechanical system 198 2002
 
Sandia Corporation (1)
5867302 Bistable microelectromechanical actuator 440 1997
 
BALL SEMICONDUCTOR, INC. (1)
2002/0149,834 Light modulation device and system 75 2001
 
KONINKLIJKE PHILIPS ELECTRONICS N.V. (1)
7508566 Switchable optical element 57 2003
 
The United States of America as represented by the United States Department of Energy (1)
4880493 Electronic-carrier-controlled photochemical etching process in semiconductor device fabrication 65 1988
 
Northrop Corporation (1)
5170283 Silicon spatial light modulator 181 1991
 
KABUSHIKI KAISHA TOSHIBA (1)
2007/0138,608 Device with beam structure, and semiconductor device 47 2006
 
TYCO ELECTRONICS LOGISTICS AG (1)
5673785 Micromechanical relay 56 1995
 
LOCKHEED MARTIN CORPORATION (1)
4982184 Electrocrystallochromic display and element 377 1989
 
BELL TELEPHONE LABORATORIES, INCORPORATED (1)
4498953 Etching techniques 163 1983
 
AKZO N.V. (1)
5381232 Fabry-perot with device mirrors including a dielectric coating outside the resonant cavity 230 1993
 
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC. (1)
6940630 Vertical displacement device 95 2004
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
4560435 Composite back-etch/lift-off stencil for proximity effect minimization 132 1984
 
ADVANCED MICRO DEVICES, INC. (1)
6335235 Simplified method of patterning field dielectric regions in a semiconductor device 79 1999
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (3)
4925259 Multilayer optical dielectric coating 113 1988
7053737 Stress bimorph MEMS switches and methods of making same 87 2002
2007/0153,860 Sub-wavelength grating integrated VCSEL 75 2006
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (5)
6632698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 290 2001
7245285 Pixel device 82 2004
2005/0196,074 Method and system for searching form features for form identification 3 2005
2005/0196,074 Method and system for searching form features for form identification 3 2005
2007/0077,525 Multi-level layer 67 2005
 
McDonnell Douglas Corporation (1)
4973131 Modulator mirror 98 1989
 
LUCENT TECHNOLOGIES INC. (11)
5636052 Direct view display based on a micromechanical modulation 329 1994
5825528 Phase-mismatched fabry-perot cavity micromechanical modulator 337 1995
5710656 Micromechanical optical modulator having a reduced-mass composite membrane 298 1996
5838484 Micromechanical optical modulator with linear operating characteristic 213 1996
5808781 Method and apparatus for an improved micromechanical modulator 167 1997
5786927 Gas-damped micromechanical structure 133 1997
5870221 Micromechanical modulator having enhanced performance 97 1997
5914804 Double-cavity micromechanical optical modulator with plural multilayer mirrors 203 1998
5949571 Mars optical modulators 86 1998
6351329 Optical attenuator 126 1999
6519073 Micromechanical modulator and methods for fabricating the same 95 2000
 
U.S. PHILIPS CORPORATION (2)
4403248 Display device with deformable reflective medium 367 1981
4681403 Display device with micromechanical leaf spring switches 245 1986
 
YOKOGAWA ELECTRIC CORPORATION (1)
4421381 Mechanical vibrating element 231 1981
 
AXSUN TECHNOLOGIES LLC (1)
6836366 Integrated tunable fabry-perot filter and method of making same 71 2000
 
UNIVERSITY OF CINCINNATI (1)
2008/0297,880 Display Capable Electrowetting Light Valve 120 2005
 
DENSO CORPORATION (1)
2005/0210,866 Drive device for a secondary air injection system 2 2004
 
VENTURE LENDING & LEASING IV, INC. (7)
6356378 Double substrate reflective spatial light modulator 279 2000
6844959 Spatial light modulators with light absorbing areas 178 2002
6849471 Barrier layers for microelectromechanical systems 85 2003
6960305 Methods for forming and releasing microelectromechanical structures 95 2003
2005/0275,930 Micromirror array assembly with in-array pillars 71 2004
6947200 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 176 2004
7459402 Protection layers in micromirror array devices 75 2005
 
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. (1)
5719068 Method for anisotropic etching conductive film 100 1995
 
Tandy Corporation (1)
5014259 Recording medium having an insulating layer 18 1989
 
MEMS OPTICAL, INC. (1)
6384952 Vertical comb drive actuated deformable mirror device and method 148 1998
 
TEXAS INSTRUMENTS INCORPORATED (16)
4441791 Deformable mirror light modulator 661 1982
4956619 Spatial light modulator 601 1988
5028939 Spatial light modulator system 409 1989
4954789 Spatial light modulator 602 1989
5096279 Spatial light modulator and method 550 1990
5818095 High-yield spatial light modulator with light blocking layer 329 1992
5285196 Bistable DMD addressing method 128 1992
5452138 Deformable mirror device with integral color filter 157 1993
5526172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 434 1993
5665997 Grated landing area to eliminate sticking of micro-mechanical devices 319 1994
5485304 Support posts for micro-mechanical devices 129 1994
5526951 Fabrication method for digital micro-mirror devices using low temperature CVD 65 1994
5646768 Support posts for micro-mechanical devices 323 1995
6376787 Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer 168 2000
6657832 Mechanically assisted restoring force support for micromachined membranes 202 2001
7436573 Electrical connections in microelectromechanical devices 51 2005
 
TOSHIBA STORAGE DEVICE CORPORATION (1)
7198873 Lithographic processing optimization based on hypersampled correlations 30 2003
 
Optron Systems, Inc. (1)
5471341 Membrane light modulating systems 183 1993
 
SEIKO EPSON CORPORATION (4)
6452712 Method of manufacturing spatial light modulator and electronic device employing it 108 2001
6438282 Optical switching device and image display device 155 2001
7034981 Optical modulator, display device and manufacturing method for same 112 2004
2005/0068,627 Tunable optical filter and method of manufacturing same 87 2004
 
KODAK GRAPHIC COMMUNICATIONS CANADA COMPANY (1)
6661561 High frequency deformable mirror device 112 2001
 
DISCO CORPORATION (1)
6433917 Light modulation device and system 189 2000
 
MICRON TECHNOLOGY, INC. (1)
6242932 Interposer for semiconductor components having contact balls 160 1999
 
XEROX CORPORATION (2)
6807892 Pneumatic actuator with elastomeric membrane and low-power electrostatic flap valve arrangement 16 2002
7417746 Fabry-perot tunable filter systems and methods 51 2005
 
THOMSON-CSF (2)
4896033 Array of optically-controlled elements for the diffusion of electromagnetic energy 40 1989
5961848 Process for producing magnetoresistive transducers 93 1996
 
SEIKO INSTRUMENTS R&D CENTER INC. (1)
6323923 Reflective type LCD having a solar cell formed of same material and same surface as an active element 38 1999
 
JDS FITEL INC. (1)
6154586 Optical switch mechanism 79 1998
 
AU OPTRONICS CORP. (1)
2006/0017,379 Dual-sided display 82 2005
 
JDS UNIPHASE CORPORATION (1)
2003/0053,078 Microelectromechanical tunable fabry-perot wavelength monitor with thermal actuators 166 2001
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (2)
6262697 Display having viewable and conductive images 101 1998
6768555 Fabry-Perot filter apparatus with enhanced optical discrimination 117 2002
 
CORNING INCORPORATED (1)
2003/0210,851 MEMS OPTICAL SWITCH ACTUATOR 86 2000
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (3)
4672254 Surface acoustic wave devices and method of manufacture thereof 88 1985
5022745 Electrostatically deformable single crystal dielectrically coated mirror 371 1989
5771321 Micromechanical optical switch and flat panel display 303 1996
 
INNOLUME GMBH (1)
2005/0117,623 Optoelectronic device incorporating an interference filter 80 2004
 
Quantum Diagnostics Ltd. (1)
4786128 Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction 310 1986
 
JENOPTIK JENA G.M.B.H. (1)
4441789 Resonance absorber 119 1981
 
Miradia Inc. (1)
7184195 Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator 59 2005
 
LENOVO (SINGAPORE) PTE LTD. (1)
6377233 Micromechanical display and fabrication method 132 2001
 
Memlink Ltd. (1)
6535663 Microelectromechanical device with moving element 45 2000
 
The United States of America as represented by the Secretary of the Air Force (2)
4655554 Spatial light modulator having a capacitively coupled photoconductor 111 1985
6028689 Multi-motion micromirror 274 1997
 
WASHINGTON STATE UNIVERSITY (1)
7235914 Piezoelectric micro-transducers, methods of use and manufacturing methods for same 19 2001
 
SHARP KABUSHIKI KAISHA (4)
4859060 Variable interferometric device and a process for the production of the same 406 1986
5734177 Semiconductor device, active-matrix substrate and method for fabricating the same 129 1996
6002661 Deformable mirror and optical data reproducing apparatus using the same 30 1997
7113339 Interferometric modulator and display unit 112 2004
 
GENERAL ELECTRIC COMPANY (1)
5454904 Micromachining methods for making micromechanical moving structures including multiple contact switching system 125 1994
 
POPKIN FAMILY ASSETS, L.L.C. (1)
6597490 Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same 169 2001
 
SNAPTRACK, INC. (100)
6040937 Interferometric modulation 702 1996
6674562 Interferometric modulation of radiation 808 1998
6055090 Interferometric modulation 495 1999
2001/0003,487 VISIBLE SPECTRUM MODULATOR ARRAYS 318 1999
7123216 Photonic MEMS and structures 614 1999
6867896 Interferometric modulation of radiation 437 2001
6680792 Interferometric modulation of radiation 626 2001
6650455 Photonic mems and structures 628 2001
2002/0075,555 Interferometric modulation of radiation 461 2001
6794119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 494 2002
6710908 Controlling micro-electro-mechanical cavities 445 2002
7126738 Visible spectrum modulator arrays 176 2002
6574033 Microelectromechanical systems device and method for fabricating same 566 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 310 2002
6912022 Optical interference color display and optical interference modulator 261 2003
7221495 Thin film precursor stack for MEMS manufacturing 122 2003
7460291 Separable modulator 70 2003
6982820 Color changeable pixel 178 2003
2004/0175,577 Structure of a light-incidence electrode of an optical interference display plate 227 2003
2004/0209,195 Method for fabricating an interference display unit 237 2003
6870654 Structure of a structure release and a method for manufacturing the same 216 2003
6882458 Structure of an optical interference display cell 262 2003
2004/0240,032 Interferometric modulation of radiation 327 2004
7119945 Altering temporal response of microelectromechanical elements 154 2004
6958847 Structure of an optical interference display unit 225 2004
6882461 Micro electro mechanical system display cell and method for fabricating thereof 224 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 250 2004
2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 247 2004
6952303 Interferometric modulation pixels and manufacturing method thereof 213 2004
7476327 Method of manufacture for microelectromechanical devices 55 2004
6980350 Optical interference reflective element and repairing and manufacturing methods thereof 161 2004
2005/0195,462 Interference display plate and manufacturing method thereof 258 2004
7006272 Color changeable pixel 141 2004
2006/0007,517 Structure of a micro electro mechanical system 107 2004
2006/0066,640 Display region architectures 78 2005
7184202 Method and system for packaging a MEMS device 128 2005
7289259 Conductive bus structure for interferometric modulator array 83 2005
7302157 System and method for multi-level brightness in interferometric modulation 66 2005
7321456 Method and device for corner interferometric modulation 62 2005
7372613 Method and device for multistate interferometric light modulation 91 2005
7420725 Device having a conductive light absorbing mask and method for fabricating same 68 2005
7527995 Method of making prestructure for MEMS systems 46 2005
2006/0066,599 Reflective display pixels arranged in non-rectangular arrays 65 2005
7460292 Interferometric modulator with internal polarization and drive method 41 2005
2006/0065,940 Analog interferometric modulator device 96 2005
7554714 Device and method for manipulation of thermal response in a modulator 42 2005
7130104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 84 2005
2006/0024,880 System and method for micro-electromechanical operation of an interferometric modulator 135 2005
2006/0077,156 MEMS device having deformable membrane characterized by mechanical persistence 71 2005
2006/0067,649 Apparatus and method for reducing slippage between structures in an interferometric modulator 61 2005
7327510 Process for modifying offset voltage characteristics of an interferometric modulator 240 2005
7564612 Photonic MEMS and structures 92 2005
2006/0066,641 Method and device for manipulating color in a display 84 2005
2006/0067,651 Photonic MEMS and structures 97 2005
2006/0220,160 Structure of a structure release and a method for manufacturing the same 98 2005
7236284 Photonic MEMS and structures 112 2005
7550810 MEMS device having a layer movable at asymmetric rates 48 2006
7532377 Movable micro-electromechanical device 59 2006
7372619 Display device having a movable structure for modulating light and method thereof 102 2006
7321457 Process and structure for fabrication of MEMS device having isolated edge posts 88 2006
2007/0279,729 Analog interferometric modulator device with electrostatic actuation and release 42 2006
7385744 Support structure for free-standing MEMS device and methods for forming the same 61 2006
2008/0055,707 Support structure for free-standing MEMS device and methods for forming the same 37 2006
7527998 Method of manufacturing MEMS devices providing air gap control 20 2006
7554711 MEMS devices with stiction bumps 67 2006
2006/0262,126 Transparent thin films 46 2006
7385762 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 65 2006
2008/0121,503 Compatible MEMS switch architecture 1 2006
2007/0086,078 Circuits for controlling display apparatus 125 2006
2007/0285,761 MEMS device with integrated optical element 65 2007
2007/0121,118 White interferometric modulators and methods for forming the same 51 2007
2007/0177,247 Method and device for modulating light with multiple electrodes 85 2007
2007/0216,987 Methods and apparatus for actuating displays 106 2007
2007/0253,054 DISPLAY DEVICES COMPRISING OF INTERFEROMETRIC MODULATOR AND SENSOR 75 2007
2008/0013,144 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 41 2007
2008/0013,145 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 62 2007
2008/0037,093 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 90 2007
2008/0088,904 Method and device for modulating light with semiconductor substrate 90 2007
2008/0088,910 SYSTEM AND METHOD FOR A MEMS DEVICE 95 2007
2008/0088,911 SYSTEM AND METHOD FOR A MEMS DEVICE 81 2007
2008/0088,912 SYSTEM AND METHOD FOR A MEMS DEVICE 88 2007
2008/0106,782 SYSTEM AND METHOD FOR A MEMS DEVICE 87 2007
7492503 System and method for multi-level brightness in interferometric modulation 45 2007
2008/0080,043 CONDUCTIVE BUS STRUCTURE FOR INTERFEROMETRIC MODULATOR ARRAY 58 2007
7542198 Device having a conductive light absorbing mask and method for fabricating same 43 2007
2008/0055,706 REFLECTIVE DISPLAY DEVICE HAVING VIEWABLE DISPLAY ON BOTH SIDES 68 2007
7532386 Process for modifying offset voltage characteristics of an interferometric modulator 16 2007
2008/0110,855 METHODS AND DEVICES FOR INHIBITING TILTING OF A MIRROR IN AN INTERFEROMETRIC MODULATOR 68 2008
2008/0112,035 METHODS AND DEVICES FOR INHIBITING TILTING OF A MOVABLE ELEMENT IN A MEMS DEVICE 46 2008
2008/0247,028 METHOD AND DEVICE FOR MULTISTATE INTERFEROMETRIC LIGHT MODULATION 43 2008
2009/0068,781 METHOD OF MANUFACTURE FOR MICROELECTROMECHANICAL DEVICES 50 2008
2009/0080,060 SEPARABLE MODULATOR 51 2008
2010/0039,370 METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF 47 2009
2009/0201,566 DEVICE HAVING A CONDUCTIVE LIGHT ABSORBING MASK AND METHOD FOR FABRICATING SAME 39 2009
2009/0213,450 SUPPORT STRUCTURES FOR ELECTROMECHANICAL SYSTEMS AND METHODS OF FABRICATING THE SAME 50 2009
2009/0279,162 PHOTONIC MEMS AND STRUCTURES 64 2009
2010/0080,890 APPARATUS AND METHOD FOR REDUCING SLIPPAGE BETWEEN STRUCTURES IN AN INTERFEROMETRIC MODULATOR 35 2009
2010/0085,626 APPARATUS AND METHOD FOR REDUCING SLIPPAGE BETWEEN STRUCTURES IN AN INTERFEROMETRIC MODULATOR 33 2009
2010/0118,382 ANALOG INTERFEROMETRIC MODULATOR DEVICE WITH ELECTROSTATIC ACTUATION AND RELEASE 39 2010
7852544 Separable modulator 56 2010
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (1)
5677783 Method of making a deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 109 1995
 
Reflectvity, Inc (1)
6913942 Sacrificial layers for use in fabrications of microelectromechanical devices 90 2003
 
NUVOTRONICS, LLC (1)
6698295 Microstructures comprising silicon nitride layer and thin conductive polysilicon layer 99 2000
 
SILICON LIGHT MACHINES CORPORATION (3)
6466354 Method and apparatus for interferometric modulation of light 287 2000
6813059 Reduced formation of asperities in contact micro-structures 90 2002
7027204 High-density spatial light modulator 73 2004
 
VAISALA OY (2)
5561523 Electrically tunable fabry-perot interferometer produced by surface micromechanical techniques for use in optical material analysis 147 1995
5646729 Single-channel gas concentration measurement method and apparatus using a short-resonator Fabry-Perot interferometer 146 1995
 
Honeywell Inc. (2)
5559358 Opto-electro-mechanical device or filter, process for making, and sensors made therefrom 390 1994
5528707 Bidirectional optical modulator having lightwave signal conservation 25 1994
 
FSI INTERNATIONAL, INC. (1)
6065424 Electroless deposition of metal films with spray processor 215 1996
 
INTPAX, INC. (1)
6556338 MEMS based variable optical attenuator (MBVOA) 93 2001
 
Exxon Research and Engineering Company (1)
4497974 Realization of a thin film solar cell with a detached reflector 124 1982
 
EASTMAN KODAK COMPANY (1)
5881449 Method of making a microceramic electromagnetic light shutter 17 1997
 
LAWRENCE LIVERMORE NATIONAL SECURITY, LLC (1)
6791735 Differentially-driven MEMS spatial light modulator 28 2003
 
TERAVICTA TECHNOLOGIES, INC. (1)
6787438 Device having one or more contact structures interposed between a pair of electrodes 74 2001
 
Japan Electronic Industry Development Association (1)
4425572 Thin film transistor 57 1981
 
HOEL, CARLTON H. (1)
5619061 Micromechanical microwave switching 202 1994
 
WISPRY, INC. (2)
6876047 MEMS device having a trilayered beam and related methods 32 2002
6876482 MEMS device having contact and standoff bumps and related methods 77 2002
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
5920418 Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator 132 1995
 
UNIVERSITY OF SOUTHERN CALIFORNIA (1)
5367878 Transient energy release microdevices and methods 55 1992
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
SNAPTRACK, INC. (11)
* 2011/0235,156 METHODS AND DEVICES FOR PRESSURE DETECTION 0 2010
9057872 Dielectric enhanced mirror for IMOD display 1 2011
9134527 Pixel via and methods of forming the same 1 2011
8963159 Pixel via and methods of forming the same 1 2011
8817357 Mechanical layer and methods of forming the same 2 2011
8659816 Mechanical layer and methods of making the same 0 2011
8797632 Actuation and calibration of charge neutral electrode of a display device 0 2011
8736939 Matching layer thin-films for an electromechanical systems reflective display device 1 2011
8964280 Method of manufacturing MEMS devices providing air gap control 1 2012
8693084 Interferometric modulator in transmission mode 0 2012
9081188 Matching layer thin-films for an electromechanical systems reflective display device 0 2014
* Cited By Examiner

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