US Patent No: 7,952,787

Number of patents in Portfolio can not be more than 2000

Method of manufacturing MEMS devices providing air gap control

ALSO PUBLISHED AS: 20090273823
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Abstract

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Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA693

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kogut, Lior Sunnyvale, CA 80 1235
Tung, Ming-Hau San Francisco, CA 121 2252

Cited Art Landscape

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6,982,820 Color changeable pixel 171 2003
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2006/0007,517 Structure of a micro electro mechanical system 100 2004
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2006/0065,940 Analog interferometric modulator device 92 2005
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2006/0077,156 MEMS device having deformable membrane characterized by mechanical persistence 69 2005
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7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 225 2005
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2008/0055,707 Support structure for free-standing MEMS device and methods for forming the same 36 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 16 2006
7,554,711 MEMS devices with stiction bumps 55 2006
2006/0262,126 Transparent thin films 45 2006
7,385,762 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 58 2006
2008/0121,503 Compatible MEMS switch architecture 1 2006
2007/0285,761 MEMS device with integrated optical element 62 2007
2007/0121,118 White interferometric modulators and methods for forming the same 49 2007
2007/0177,247 Method and device for modulating light with multiple electrodes 83 2007
2007/0253,054 DISPLAY DEVICES COMPRISING OF INTERFEROMETRIC MODULATOR AND SENSOR 71 2007
2008/0013,144 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 38 2007
2008/0013,145 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 54 2007
2008/0037,093 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 88 2007
2008/0088,904 Method and device for modulating light with semiconductor substrate 87 2007
2008/0088,910 SYSTEM AND METHOD FOR A MEMS DEVICE 91 2007
2008/0088,911 SYSTEM AND METHOD FOR A MEMS DEVICE 80 2007
2008/0088,912 SYSTEM AND METHOD FOR A MEMS DEVICE 87 2007
2008/0106,782 SYSTEM AND METHOD FOR A MEMS DEVICE 86 2007
7,492,503 System and method for multi-level brightness in interferometric modulation 38 2007
2008/0080,043 CONDUCTIVE BUS STRUCTURE FOR INTERFEROMETRIC MODULATOR ARRAY 55 2007
7,542,198 Device having a conductive light absorbing mask and method for fabricating same 36 2007
2008/0055,706 REFLECTIVE DISPLAY DEVICE HAVING VIEWABLE DISPLAY ON BOTH SIDES 65 2007
7,532,386 Process for modifying offset voltage characteristics of an interferometric modulator 15 2007
2008/0110,855 METHODS AND DEVICES FOR INHIBITING TILTING OF A MIRROR IN AN INTERFEROMETRIC MODULATOR 65 2008
2008/0112,035 METHODS AND DEVICES FOR INHIBITING TILTING OF A MOVABLE ELEMENT IN A MEMS DEVICE 45 2008
2008/0247,028 METHOD AND DEVICE FOR MULTISTATE INTERFEROMETRIC LIGHT MODULATION 42 2008
2009/0068,781 METHOD OF MANUFACTURE FOR MICROELECTROMECHANICAL DEVICES 49 2008
2009/0080,060 SEPARABLE MODULATOR 50 2008
2010/0039,370 METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF 46 2009
2009/0201,566 DEVICE HAVING A CONDUCTIVE LIGHT ABSORBING MASK AND METHOD FOR FABRICATING SAME 37 2009
2009/0213,450 SUPPORT STRUCTURES FOR ELECTROMECHANICAL SYSTEMS AND METHODS OF FABRICATING THE SAME 47 2009
2009/0279,162 PHOTONIC MEMS AND STRUCTURES 59 2009
2010/0080,890 APPARATUS AND METHOD FOR REDUCING SLIPPAGE BETWEEN STRUCTURES IN AN INTERFEROMETRIC MODULATOR 33 2009
2010/0085,626 APPARATUS AND METHOD FOR REDUCING SLIPPAGE BETWEEN STRUCTURES IN AN INTERFEROMETRIC MODULATOR 31 2009
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7,852,544 Separable modulator 50 2010
 
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* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (8)
9,057,872 Dielectric enhanced mirror for IMOD display 0 2011
8,963,159 Pixel via and methods of forming the same 0 2011
8,817,357 Mechanical layer and methods of forming the same 1 2011
8,659,816 Mechanical layer and methods of making the same 0 2011
8,797,632 Actuation and calibration of charge neutral electrode of a display device 0 2011
8,736,939 Matching layer thin-films for an electromechanical systems reflective display device 0 2011
8,964,280 Method of manufacturing MEMS devices providing air gap control 0 2012
8,693,084 Interferometric modulator in transmission mode 0 2012
* Cited By Examiner

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