US Patent No: 7,952,787

Number of patents in Portfolio can not be more than 2000

Method of manufacturing MEMS devices providing air gap control

ALSO PUBLISHED AS: 20090273823

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Abstract

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Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA644

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kogut, Lior Sunnyvale, CA 76 907
Tung, Ming-Hau San Francisco, CA 117 1756

Cited Art Landscape

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (95)
6,040,937 Interferometric modulation 623 1996
6,674,562 Interferometric modulation of radiation 658 1998
6,055,090 Interferometric modulation 444 1999
7,123,216 Photonic MEMS and structures 534 1999
6,867,896 Interferometric modulation of radiation 388 2001
6,680,792 Interferometric modulation of radiation 501 2001
6,650,455 Photonic mems and structures 495 2001
2002/0075,555 Interferometric modulation of radiation 411 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 378 2002
6,710,908 Controlling micro-electro-mechanical cavities 336 2002
7,126,738 Visible spectrum modulator arrays 131 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 441 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 285 2002
6,912,022 Optical interference color display and optical interference modulator 236 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 101 2003
7,460,291 Separable modulator 49 2003
6,982,820 Color changeable pixel 152 2003
2004/0209,195 Method for fabricating an interference display unit 217 2003
6,870,654 Structure of a structure release and a method for manufacturing the same 195 2003
6,882,458 Structure of an optical interference display cell 236 2003
2004/0240,032 Interferometric modulation of radiation 302 2004
7,119,945 Altering temporal response of microelectromechanical elements 130 2004
6,958,847 Structure of an optical interference display unit 205 2004
6,882,461 Micro electro mechanical system display cell and method for fabricating thereof 200 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 226 2004
2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 223 2004
6,952,303 Interferometric modulation pixels and manufacturing method thereof 194 2004
7,476,327 Method of manufacture for microelectromechanical devices 35 2004
6,980,350 Optical interference reflective element and repairing and manufacturing methods thereof 139 2004
2005/0195,462 Interference display plate and manufacturing method thereof 234 2004
7,006,272 Color changeable pixel 115 2004
2006/0007,517 Structure of a micro electro mechanical system 87 2004
2006/0066,640 Display region architectures 69 2005
7,184,202 Method and system for packaging a MEMS device 90 2005
7,289,259 Conductive bus structure for interferometric modulator array 62 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 44 2005
7,321,456 Method and device for corner interferometric modulation 39 2005
7,372,613 Method and device for multistate interferometric light modulation 70 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 35 2005
2006/0066,599 Reflective display pixels arranged in non-rectangular arrays 62 2005
7,527,995 Method of making prestructure for MEMS systems 26 2005
2006/0065,940 Analog interferometric modulator device 76 2005
7,460,292 Interferometric modulator with internal polarization and drive method 24 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 23 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 59 2005
2006/0024,880 System and method for micro-electromechanical operation of an interferometric modulator 114 2005
2006/0077,156 MEMS device having deformable membrane characterized by mechanical persistence 63 2005
2006/0067,649 Apparatus and method for reducing slippage between structures in an interferometric modulator 52 2005
2006/0066,641 Method and device for manipulating color in a display 65 2005
2006/0067,651 Photonic MEMS and structures 90 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 182 2005
7,564,612 Photonic MEMS and structures 63 2005
7,236,284 Photonic MEMS and structures 90 2005
7,550,810 MEMS device having a layer movable at asymmetric rates 24 2006
7,532,377 Movable micro-electromechanical device 34 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 80 2006
2007/0279,729 Analog interferometric modulator device with electrostatic actuation and release 36 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 68 2006
2008/0055,707 Support structure for free-standing MEMS device and methods for forming the same 34 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 47 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 11 2006
2006/0262,126 Transparent thin films 42 2006
7,554,711 MEMS devices with stiction bumps 40 2006
7,385,762 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 47 2006
2008/0121,503 Compatible MEMS switch architecture 1 2006
2007/0285,761 MEMS device with integrated optical element 52 2007
2007/0121,118 White interferometric modulators and methods for forming the same 46 2007
2007/0177,247 Method and device for modulating light with multiple electrodes 78 2007
2007/0253,054 DISPLAY DEVICES COMPRISING OF INTERFEROMETRIC MODULATOR AND SENSOR 56 2007
2008/0013,144 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 37 2007
2008/0013,145 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 48 2007
2008/0037,093 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 83 2007
2008/0088,904 Method and device for modulating light with semiconductor substrate 83 2007
2008/0088,910 SYSTEM AND METHOD FOR A MEMS DEVICE 80 2007
2008/0088,911 SYSTEM AND METHOD FOR A MEMS DEVICE 79 2007
2008/0088,912 SYSTEM AND METHOD FOR A MEMS DEVICE 83 2007
2008/0106,782 SYSTEM AND METHOD FOR A MEMS DEVICE 82 2007
7,492,503 System and method for multi-level brightness in interferometric modulation 25 2007
2008/0080,043 CONDUCTIVE BUS STRUCTURE FOR INTERFEROMETRIC MODULATOR ARRAY 47 2007
7,542,198 Device having a conductive light absorbing mask and method for fabricating same 26 2007
2008/0055,706 REFLECTIVE DISPLAY DEVICE HAVING VIEWABLE DISPLAY ON BOTH SIDES 55 2007
7,532,386 Process for modifying offset voltage characteristics of an interferometric modulator 8 2007
2008/0110,855 METHODS AND DEVICES FOR INHIBITING TILTING OF A MIRROR IN AN INTERFEROMETRIC MODULATOR 53 2008
2008/0112,035 METHODS AND DEVICES FOR INHIBITING TILTING OF A MOVABLE ELEMENT IN A MEMS DEVICE 44 2008
2008/0247,028 METHOD AND DEVICE FOR MULTISTATE INTERFEROMETRIC LIGHT MODULATION 40 2008
2009/0068,781 METHOD OF MANUFACTURE FOR MICROELECTROMECHANICAL DEVICES 48 2008
2009/0080,060 SEPARABLE MODULATOR 49 2008
2010/0039,370 METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF 42 2009
2009/0201,566 DEVICE HAVING A CONDUCTIVE LIGHT ABSORBING MASK AND METHOD FOR FABRICATING SAME 34 2009
2009/0213,450 SUPPORT STRUCTURES FOR ELECTROMECHANICAL SYSTEMS AND METHODS OF FABRICATING THE SAME 37 2009
2009/0279,162 PHOTONIC MEMS AND STRUCTURES 42 2009
2010/0080,890 APPARATUS AND METHOD FOR REDUCING SLIPPAGE BETWEEN STRUCTURES IN AN INTERFEROMETRIC MODULATOR 29 2009
2010/0085,626 APPARATUS AND METHOD FOR REDUCING SLIPPAGE BETWEEN STRUCTURES IN AN INTERFEROMETRIC MODULATOR 27 2009
2010/0118,382 ANALOG INTERFEROMETRIC MODULATOR DEVICE WITH ELECTROSTATIC ACTUATION AND RELEASE 28 2010
7,852,544 Separable modulator 37 2010
 
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4,441,791 Deformable mirror light modulator 613 1982
4,956,619 Spatial light modulator 571 1988
5,028,939 Spatial light modulator system 384 1989
4,954,789 Spatial light modulator 556 1989
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5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 399 1993
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 295 1994
5,485,304 Support posts for micro-mechanical devices 118 1994
5,526,951 Fabrication method for digital micro-mirror devices using low temperature CVD 56 1994
5,646,768 Support posts for micro-mechanical devices 299 1995
6,376,787 Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer 151 2000
6,657,832 Mechanically assisted restoring force support for micromachined membranes 181 2001
7,436,573 Electrical connections in microelectromechanical devices 36 2005
 
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5,636,052 Direct view display based on a micromechanical modulation 301 1994
5,825,528 Phase-mismatched fabry-perot cavity micromechanical modulator 315 1995
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5,838,484 Micromechanical optical modulator with linear operating characteristic 190 1996
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5,870,221 Micromechanical modulator having enhanced performance 79 1997
5,914,804 Double-cavity micromechanical optical modulator with plural multilayer mirrors 174 1998
5,949,571 Mars optical modulators 81 1998
6,351,329 Optical attenuator 108 1999
6,519,073 Micromechanical modulator and methods for fabricating the same 72 2000
 
VENTURE LENDING & LEASING IV, INC. (7)
6,356,378 Double substrate reflective spatial light modulator 251 2000
6,844,959 Spatial light modulators with light absorbing areas 132 2002
6,849,471 Barrier layers for microelectromechanical systems 62 2003
6,960,305 Methods for forming and releasing microelectromechanical structures 73 2003
2005/0275,930 Micromirror array assembly with in-array pillars 40 2004
6,947,200 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 154 2004
7,459,402 Protection layers in micromirror array devices 57 2005
 
SEIKO EPSON CORPORATION (4)
6,452,712 Method of manufacturing spatial light modulator and electronic device employing it 89 2001
6,438,282 Optical switching device and image display device 136 2001
7,034,981 Optical modulator, display device and manufacturing method for same 87 2004
2005/0068,627 Tunable optical filter and method of manufacturing same 66 2004
 
SHARP KABUSHIKI KAISHA (4)
4,859,060 Variable interferometric device and a process for the production of the same 373 1986
5,734,177 Semiconductor device, active-matrix substrate and method for fabricating the same 101 1996
6,002,661 Deformable mirror and optical data reproducing apparatus using the same 26 1997
7,113,339 Interferometric modulator and display unit 87 2004
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (3)
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 268 2001
7,245,285 Pixel device 60 2004
2007/0077,525 Multi-level layer 51 2005
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (3)
4,672,254 Surface acoustic wave devices and method of manufacture thereof 80 1985
5,022,745 Electrostatically deformable single crystal dielectrically coated mirror 343 1989
5,771,321 Micromechanical optical switch and flat panel display 262 1996
 
SILICON LIGHT MACHINES CORPORATION (3)
6,466,354 Method and apparatus for interferometric modulation of light 262 2000
6,813,059 Reduced formation of asperities in contact micro-structures 72 2002
7,027,204 High-density spatial light modulator 56 2004
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (3)
4,925,259 Multilayer optical dielectric coating 90 1988
7,053,737 Stress bimorph MEMS switches and methods of making same 74 2002
2007/0153,860 Sub-wavelength grating integrated VCSEL 48 2006
 
CANON KABUSHIKI KAISHA (2)
2003/0137,680 IMAGE PROCESSING APPARATUS, METHOD OF CONTROLLING SAME, AND IMAGE PROCESSING SYSTEM 1 1998
2003/0137,680 IMAGE PROCESSING APPARATUS, METHOD OF CONTROLLING SAME, AND IMAGE PROCESSING SYSTEM 1 1998
 
FUJI PHOTO FILM CO., LTD. (2)
6,327,071 Drive methods of array-type light modulation element and flat-panel display 252 1999
7,046,422 Reflection-type light modulating array element and exposure apparatus 80 2004
 
Honeywell Inc. (2)
5,559,358 Opto-electro-mechanical device or filter, process for making, and sensors made therefrom 363 1994
5,528,707 Bidirectional optical modulator having lightwave signal conservation 18 1994
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (2)
6,262,697 Display having viewable and conductive images 82 1998
6,768,555 Fabry-Perot filter apparatus with enhanced optical discrimination 86 2002
 
PIXTRONIX, INC. (2)
2007/0086,078 Circuits for controlling display apparatus 84 2006
2007/0216,987 Methods and apparatus for actuating displays 76 2007
 
SAMSUNG ELECTRONICS CO., LTD. (2)
5,699,181 Deformable mirror device and manufacturing method thereof 64 1996
2006/0066,926 Color transforming device using brightness information of image and display device and the method thereof 19 2005
 
The United States of America as represented by the Secretary of the Air Force (2)
4,655,554 Spatial light modulator having a capacitively coupled photoconductor 90 1985
6,028,689 Multi-motion micromirror 252 1997
 
Thomson-CSF (2)
4,896,033 Array of optically-controlled elements for the diffusion of electromagnetic energy 32 1989
5,961,848 Process for producing magnetoresistive transducers 73 1996
 
U.S. Philips Corporation (2)
4,403,248 Display device with deformable reflective medium 336 1981
4,681,403 Display device with micromechanical leaf spring switches 220 1986
 
Vaisala Oy (2)
5,561,523 Electrically tunable fabry-perot interferometer produced by surface micromechanical techniques for use in optical material analysis 122 1995
5,646,729 Single-channel gas concentration measurement method and apparatus using a short-resonator Fabry-Perot interferometer 126 1995
 
WISPRY, INC. (2)
6,876,047 MEMS device having a trilayered beam and related methods 15 2002
6,876,482 MEMS device having contact and standoff bumps and related methods 56 2002
 
XEROX CORPORATION (2)
6,807,892 Pneumatic actuator with elastomeric membrane and low-power electrostatic flap valve arrangement 8 2002
7,417,746 Fabry-perot tunable filter systems and methods 29 2005
 
ADVANCED MICRO DEVICES, INC. (1)
6,335,235 Simplified method of patterning field dielectric regions in a semiconductor device 59 1999
 
AKZO N.V. (1)
5,381,232 Fabry-perot with device mirrors including a dielectric coating outside the resonant cavity 207 1993
 
AU OPTRONICS CORP. (1)
2006/0017,379 Dual-sided display 64 2005
 
AXSUN TECHNOLOGIES, INC. (1)
6,836,366 Integrated tunable fabry-perot filter and method of making same 54 2000
 
BALL SEMICONDUCTOR, INC. (1)
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Bell Telephone Laboratories, Incorporated (1)
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CADILLAC RUBBER & PLASTICS, INC. (1)
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CAPELLA MICROSYSTEMS, CORP. (1)
2006/0180,886 Ambient light filter structure 32 2005
 
CHEETAH OMNI, LLC (1)
6,407,851 Micromechanical optical switch 172 2000
 
CORNING INCORPORATED (1)
2003/0210,851 MEMS OPTICAL SWITCH ACTUATOR 74 2000
 
DENSO CORPORATION (1)
2005/0210,866 Drive device for a secondary air injection system 2004
 
DISCO CORPORATION (1)
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EASTMAN KODAK COMPANY (1)
5,881,449 Method of making a microceramic electromagnetic light shutter 10 1997
 
ECHELLE, INC. (1)
5,661,592 Method of making and an apparatus for a flat diffraction grating light valve 229 1995
 
ENERGY, UNITED STATES DEPARTMENT OF (1)
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Exxon Research and Engineering Company (1)
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FSI INTERNATIONAL, INC. (1)
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HOEL, CARLTON H. (1)
5,619,061 Micromechanical microwave switching 182 1994
 
HOYA CORPORATION (1)
6,353,489 Optical retro-reflection device 11 2000
 
INNOLUME GMBH (1)
2005/0117,623 Optoelectronic device incorporating an interference filter 56 2004
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
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INTPAX, INC. (1)
6,556,338 MEMS based variable optical attenuator (MBVOA) 74 2001
 
IRIDIGM DISPLAY CORPORATION (1)
2001/0003,487 VISIBLE SPECTRUM MODULATOR ARRAYS 287 1999
 
Japan Electronic Industry Development Association (1)
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JDS FITEL INC. (1)
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KONINKLIJKE PHILIPS ELECTRONICS N.V. (1)
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LAWRENCE LIVERMORE NATIONAL SECURITY, LLC (1)
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LENOVO (SINGAPORE) PTE LTD. (1)
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Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (3)
8,659,816 Mechanical layer and methods of making the same 0 2011
8,736,939 Matching layer thin-films for an electromechanical systems reflective display device 0 2011
8,693,084 Interferometric modulator in transmission mode 0 2012

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