
US Patent No: 7,954,449
Number of patents in Portfolio can not be more than 2000
Wiring-free, plumbing-free, cooled, vacuum chuck
Stats
-
Jun 7, 2011
Issued date -
May 8, 2007
filing date -
11/746,012
serial no -
In Force
status
Importance
Abstract
A solar cell production system utilizes self-contained vacuum chucks that hold and cool solar cell wafers during transport on a conveyor between processing stations during a fabrication process. Each self-contained vacuum chuck includes its own local vacuum pump and a closed-loop cooling system. After each wafer is processed, it is removed from its vacuum chuck, and the vacuum chuck is returned to the start of the production line by a second conveyor belt. In one embodiment, each vacuum chuck includes an inductive power supply that is inductively coupled to an external source to drive that vacuum chuck's vacuum pump and cooling system. An optional battery is recharged by the inductive power supply, and is used to power the vacuum pump and cooling system during hand-off between adjacent processing stations.
First Claim
Related Publications
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art
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Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Dec 7, 2014 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Dec 7, 2018 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 7, 2022 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 3.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |