Family

Loading Family data...

• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
TOKYO ELECTRON LIMITED	TOKYO 107-6325

International Classification(s)

• G03D:APPARATUS FOR PROCESSING EXPOSED PHOTOGRAPHIC MATE....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Hayashi, Shinichi	Koshi, JP	211	2964
Hayashida, Yasushi	Koshi, JP	34	842
Matsuoka, Nobuaki	Koshi, JP	59	1231

Cited Art Landscape

Load Citation

• No Cited Art to Display

Loading Cited Art Landscape...

Patent Citation Ranking

Forward Cite Landscape

Load Citation

• No Forward Cites to Display

Loading Forward Cite Landscape...

Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
June 07, 2011	US,7955011,B2   US7955011B2	GRANTED PATENT AS SECOND PUBLICATION
January 17, 2008	US,20080014333,A1   US20080014333A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7955011

Coating and developing apparatus, substrate processing method, and storage medium

---

 

Legal Events