Method of growing electrical conductors

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7955979
APP PUB NO 20080146042A1
SERIAL NO

12039689

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Abstract

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A method for forming a conductive thin film includes depositing a metal oxide thin film on a substrate by an atomic layer deposition (ALD) process. The method further includes at least partially reducing the metal oxide thin film by exposing the metal oxide thin film to a reducing agent, thereby forming a seed layer. In one arrangement, the reducing agent comprises one or more organic compounds that contain at least one functional group selected from the group consisting of —OH, —CHO, and —COOH. In another arrangement, the reducing agent comprises an electric current.

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Patent Owner(s)

Patent OwnerAddress
ASM INTERNATIONAL N VVERSTERKERSTRAAT 8 ALMERE 1322 AP

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Elers, Kai-Erik Helsinki, FI 50 8597
Haukka, Suvi Helsinki, FI 94 21518
Kostamo, Juhana Espoo, FI 33 3783
Soininen, Pekka J Espoo, FI 31 2256

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