Method for dopant diffusion
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United States of America Patent
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Jun 21, 2011
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app pub date -
Mar 7, 2007
filing date -
Mar 7, 2007
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Abstract
A method for controlling dopant diffusion is disclosed. Using certain control parameters that are not used in the prior art, the method provides an unprecedented measure of control over the dopant diffusion process. The control parameters include, among others, the size of the diffusion windows in the diffusion mask and the proximity of the diffusion windows to a dopant sink. In some embodiments, the diffusion process is conducted in an epi-reactor.
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