Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as a metrology target
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United States of America Patent
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Jun 21, 2011
Grant Date -
Feb 14, 2008
app pub date -
Oct 18, 2007
filing date -
Aug 26, 2005
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Abstract
Various methods and systems measure, determine, or align a position of a laser beam spot relative to a semiconductor substrate having structures on or within the semiconductor substrate to be selectively processed by delivering a processing laser beam to a processing laser beam spot. The various methods and systems utilize those structures themselves to perform the measurement, determination, or alignment.
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