Temperature controlling method of electron bombardment heating apparatus
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United States of America Patent
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Jun 28, 2011
Grant Date -
Jan 8, 2009
app pub date -
Aug 27, 2008
filing date -
May 9, 2003
priority date (Note) -
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Abstract
A method of operating an electron bombardment heating apparatus, in which thermions emitted from filaments are accelerated and impinged upon a heating plate, so as to heat the heating plate, wherein a peripheral wall of a heated material supporting member having a heating plate as a ceiling thereof is made up of multi-staged peripheral wall portions, which are stacked vertically and different in the radius thereof, and those peripheral wall portions are connected with each other by a ring-like horizontal wall. With this, thermal stress which is caused due to the difference of temperature between the lower end portion of the heated material supporting member and the heating plate when heating up the heating plate can be mitigated, thereby preventing breakage in the heated material supporting member if conducting heating and cooling upon the heating plate, repetitively.
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