Pretreatment processes within a batch ALD reactor

United States of America Patent

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Jul 5, 2011
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Oct 23, 2008
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Jun 27, 2008
filing date
Aug 26, 2005

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mixture having an ozone concentration within a range from about 5 atomic percent to about 30 atomic percent.

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APPLIED MATERIALS INC	3050 BOWERS AVENUE SANTA CLARA CA 95054

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Mahajani, Maitreyee	Saratoga, US	56	6445

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Pretreatment processes within a batch ALD reactor

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United States of America Patent

12163876

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PATENT NO	7972978
APP PUB NO	20080261413A1
SERIAL NO	12163876
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
July 05, 2011	US,7972978,B2 US7972978B2	GRANTED PATENT AS SECOND PUBLICATION
October 23, 2008	US,20080261413,A1 US20080261413A1	FIRST PUBLISHED PATENT APPLICATION

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12163876

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