System for extraction of key process parameters from fault detection classification to enable wafer prediction
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United States of America Patent
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Jul 5, 2011
Grant Date -
Nov 6, 2008
app pub date -
Feb 5, 2008
filing date -
May 4, 2007
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Abstract
A system, method, and computer readable medium for extracting a key process parameter correlative to a selected device parameter are provided. In an embodiment, the key process parameter is determined using a gene map analysis. The gene map analysis includes grouping highly correlative process parameter and determining the correlation of a group to the selected device parameter. In an embodiment, the groups having greatest correlation to the selected device parameter are displayed in a correlation matrix and/or a gene map.
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