Computer-implemented methods for determining if actual defects are potentially systematic defects or potentially random defects
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United States of America Patent
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Jul 5, 2011
Grant Date -
Feb 26, 2009
app pub date -
Aug 20, 2008
filing date -
Aug 20, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
Various computer-implemented methods for determining if actual defects are potentially systematic defects or potentially random defects are provided. One computer-implemented method for determining if actual defects are potentially systematic defects or potentially random defects includes comparing a number of actual defects in a group to a number of randomly generated defects in a group. The actual defects are detected on a wafer. A portion of a design on the wafer proximate a location of each of the actual defects in the group and each of the randomly generated defects in the group is substantially the same. The method also includes determining if the actual defects in the group are potentially systematic defects or potentially random defects based on results of the comparing step.
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