Reactor design to reduce particle deposition during process abatement

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7985379
APP PUB NO 20070274876A1
SERIAL NO

11838435

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

The present invention relates to systems and methods for controlled combustion and decomposition of gaseous pollutants while reducing deposition of unwanted reaction products from within the treatment systems. The systems include a novel thermal reaction chamber design having stacked reticulated ceramic rings through which fluid, e.g., gases, may be directed to form a boundary layer along the interior wall of the thermal reaction chamber, thereby reducing particulate matter buildup thereon. The systems further include the introduction of fluids from the center pilot jet to alter the aerodynamics of the interior of the thermal reaction chamber.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INCSANTA CLARA CA

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiu, Ho-Man Rodney San Jose, US 8 181
Clark, Daniel O Pleasanton, US 65 1257
Crawford, Shaun W San Ramon, US 21 599
Jung, Jay J Sunnyvale, US 17 279
Todd, Leonard B Napa, US 2 101
Vermeulen, Robbert Pleasant Hill, US 12 557

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation