Tweezer-equipped scanning probe microscope and transfer method
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United States of America Patent
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Aug 2, 2011
Grant Date -
Dec 4, 2008
app pub date -
May 30, 2008
filing date -
Jun 1, 2007
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A tweezer-equipped scanning probe microscope comprises a first arm with a probing portion, a second arm that moves along an opening direction or a closing direction relative to the first arm, an electrostatic actuator that drives the second arm along the opening direction or the closing direction based upon an opening/closing drive voltage applied thereto, an amplifier that induces self-oscillation in the electrostatic actuator by using an electrically equivalent circuit accompanying the electrostatic actuator as a feedback circuit and causes the second arm to vibrate through the self-oscillation, and a vibration state detection unit that detects a change of vibration state of the second arm as the second arm contacts an object.
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