Mid-entry load lock for semiconductor handling system
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United States of America Patent
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Aug 2, 2011
Grant Date -
Feb 26, 2009
app pub date -
Oct 29, 2008
filing date -
Nov 10, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
In a system having a number of semiconductor processing modules sharing a common vacuum environment, a mid-entry load lock is provided to permit insertion and removal of wafers into the vacuum environment at a point between various other robotic handlers, process modules, and load locks. This arrangement permits increased flexibility in scheduling when multiple wafers are processed concurrently.
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