Systems and methods for wafer translation
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United States of America Patent
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Aug 9, 2011
Grant Date -
May 18, 2006
app pub date -
Sep 15, 2004
filing date -
Sep 15, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A two-axis automation system can be used to transfer and rotate wafers between horizontal and vertical orientations necessary for differing steps in a semiconductor fabrication process. The two rotational axes allow for the transfer and rotation to be done in a minimal space and with a minimum amount of swept volume. A transfer arm of the automation system can include a pair of load pads capable of loading and unloading a wafer processing chamber in a single sweep.
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