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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
CARL ZEISS SMT AG	RUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

International Classification(s)

• G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Davydenko, Vladimir	Oberkochen, DE	29	94
Fiolka, Damian	Oberkochen, DE	116	2064
Kuss, Matthias	Sinningen, DE	3	22
Maul, Manfred	Aalen, DE	79	993
Reisinger, Gerd	Oberkochen, DE	10	102

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
August 09, 2011	US,7995280,B2   US7995280B2	GRANTED PATENT AS SECOND PUBLICATION
September 18, 2008	US,20080225921,A1   US20080225921A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7995280

Projection exposure system, beam delivery system and method of generating a beam of light

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