Coating and developing system with a direct carrying device in a processing block, coating and developing method and storage medium
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United States of America Patent
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Aug 16, 2011
Grant Date -
Oct 2, 2008
app pub date -
Mar 28, 2008
filing date -
Mar 30, 2007
priority date (Note) -
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Abstract
A coating and developing system includes processing blocks of the same construction each built by stacking up a plurality of unit blocks including a film forming unit block and a developing unit block in layers. The processing blocks are arranged longitudinally between a carrier block and an interface block. The number of processing blocks like the processing blocks arranged between the carrier block and the interface block is adjusted to adjust the throughput of the coating and developing system. Thus, a coating and developing system capable of achieving a desired throughput can be easily designed and manufactured.
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