Double side polishing method and apparatus

United States of America Patent

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Aug 23, 2011
Grant Date
May 27, 2010
app pub date
Nov 24, 2009
filing date
May 17, 1999

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Abstract

. Brushes and dressers are used to frequently efficiently process polishing clothes installed on opposite surfaces of the upper and lower rotary surface plates to efficiently and economically achieve high-quality double side polishing.

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Patent Owner(s)

SUMITOMO MITSUBISHI SILICON CORPORATION

International Classification(s)

B24B:MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR PO....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Fukushima, Tomio	Fujiidera, JP	5	52
Horiguchi, Akira	Kashiba, JP	27	232
Isobe, Ken	Shijyonawate, JP	3	20
Matsumoto, Hiroshi	Ikomagun, JP	501	5653
Murata, Kiyohide	Nishinomiya, JP	2	17
Takeda, Tsuneo	Sourakugun, JP	1	3
Tanaka, Heigo	Karatsu, JP	2	17
Uzu, Yoshiaki	Ikomagun, JP	2	17

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Double side polishing method and apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12625073

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PATENT NO	8002610
APP PUB NO	20100130111A1
SERIAL NO	12625073
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
August 23, 2011	US,8002610,B2 US8002610B2	GRANTED PATENT AS SECOND PUBLICATION
May 27, 2010	US,20100130111,A1 US20100130111A1	FIRST PUBLISHED PATENT APPLICATION

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12625073

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