Importance

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Abstract

Embodiments of crossbar devices constructed with Micro-Electro-Mechanical Systems (MEMS) switches are disclosed herein. A crossbar device may comprise m input terminals, n output terminals, n control lines and m×n MEMS switches coupled to the n control lines to selectively couple the m input terminals to the n output terminal. Each of the MEMS switches may comprise a contact node coupled to one of the m input terminals, a cantilever coupled to one of the n output terminals, a control node coupled to one of the n control lines to electrostatically control the cantilever to contact the contact node or be away from the contact node using electrostatic attractive or repulsive force respectively. The cantilever and the contact node are configured to remain in contact by molecular adhesion force, after the cantilever has been electrostatically controlled to contact the contact node, and the electrostatic attractive force has been removed. Other embodiments may be described and claimed.

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First Claim