Charged particle beam device and method for inspecting specimen
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 30, 2011
Grant Date -
Feb 28, 2008
app pub date -
Jul 23, 2007
filing date -
Jul 24, 2006
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A charged particle beam device is provided. The device includes a primary objective lens for focusing a primary charged particle beam, the primary objective lens defining an optical axis, a specimen stage defining a specimen location area, a deflection unit for deflecting the primary charged particle beam between the primary objective lens and the specimen location area, towards a beam path for impingement on the specimen, wherein the deflection unit is movable with respect to the optical axis.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully