Distance histogram for nearest neighbor defect classification

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United States of America Patent

PATENT NO 8014973
SERIAL NO

12202251

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Abstract

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A method for constructing a distance histogram for nearest neighbor classification. A training sample is determined for each of two classes. For each defect, a distance is measured in the feature space between the defect and the training sample for each of the classes. All of the distances for a given defect are normalized by dividing each distance for the given defect by the sum of all of the distances for the given defect. A histogram is constructed by plotting a chart of the normalized distances versus the number of defects having the distances. A threshold bar is placed on the center of the histogram to construct a normal nearest neighbor classifier. The threshold bar can be adjusted to the left or to the right to construct a weighted nearest neighbor classifier.

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Patent Owner(s)

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KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huang, Tong San Jose, US 17 272

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