Flexure based macro motion translation stage

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8016277
APP PUB NO 20020150398A1
SERIAL NO

09934248

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Abstract

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Described are flexure-based high precision positioning stages. The stages are constrained to motion along each axis by a system of symmetrical flexure linkages. The linkages may be formed of link coupled by flexure joints. Magnetic linear servomotors may provide motive force for the stages. In some embodiments, the stages may have no frictional contact joints.

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Patent Owner(s)

  • BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Byung J Austin, US 35 1914
Sreenivasan, Sidlgata V Austin, US 209 5382

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