Method of removing contaminants from a coating surface comprising an oxide or fluoride of a group IIIB metal

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United States of America Patent

PATENT NO 8016948
APP PUB NO 20090025751A1
SERIAL NO

12284540

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APPLIED MATERIALS INCCALIFORNIA USA CALIFORNIA

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Inventor Name Address # of filed Patents Total Citations
Sun, Jennifer Y Sunnyvale, US 261 13472
Wang, Xikun Sunnyvale, US 61 7960
Xu, Li San Jose, US 397 7618

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