Dual mode sensing for vibratory gyroscope
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United States of America Patent
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Sep 20, 2011
Grant Date -
Aug 6, 2009
app pub date -
Feb 5, 2008
filing date -
Feb 5, 2008
priority date (Note) -
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Abstract
An angular rate sensor is disclosed. The angular rate sensor comprises a substrate and a drive subsystem partially supported by a substrate. The drive subsystem includes at least one spring, at least one anchor, and at least one mass; the at least one mass of the drive subsystem is oscillated by at least one actuator along a first axis. Coriolis force acts on moving the drive subsystem along or around a second axis in response to angular velocity of the substrate around the third axis. The angular rate sensor also includes a sense subsystem partially supported by a substrate. The sense subsystem includes at least one spring, at least one anchor, and at least one mass.
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