Chamber lid lifting apparatus
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United States of America Patent
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Sep 27, 2011
Grant Date -
N/A
app pub date -
Oct 16, 2007
filing date -
Oct 16, 2007
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A chamber lid lifting apparatus operable to lift a chamber lid of a semiconductor processing chamber is provided. The chamber lid lifting apparatus includes a handle. The handle includes a short end and a long end that together form a lever. The short end is operable to be temporarily coupled to a lid pivot point of the chamber lid. The long end is operable to transfer an applied force to the short end. The transferred force is operable to lift the chamber lid at the lid pivot point.
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