US Patent No: 8,027,021
Number of patents in Portfolio can not be more than 2000
Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method
Stats
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Sep 27, 2011
Issued date -
Feb 21, 2007
filing date -
11/708,601
serial no -
In Force
status
Importance
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Abstract
Position information of a movable body within an XY plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a Z-axis direction orthogonal to the XY plane is measured with high accuracy by a surface position measuring system, without being affected by air fluctuations. In this case, since both of the encoder system and the surface position measuring system directly measure the upper surface of the movable body, simple and direct position control of the movable body can be performed.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 5,969,441 Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device | 396 | 1997 | |
| 6,819,425 Lithographic apparatus, device manufacturing method, and device manufactured thereby | 26 | 2001 | |
| 6,778,257 Imaging apparatus | 125 | 2002 | |
| 6,952,253 Lithographic apparatus and device manufacturing method | 132 | 2003 | |
| 7,116,401 Lithographic projection apparatus using catoptrics in an optical sensor system, optical arrangement, method of measuring, and device manufacturing method | 5 | 2003 | |
| 7,102,729 Lithographic apparatus, measurement system, and device manufacturing method | 20 | 2004 | |
| 7,289,212 Lithographic apparatus, device manufacturing method and device manufacturing thereby | 20 | 2004 | |
| 7,256,871 Lithographic apparatus and method for calibrating the same | 15 | 2004 | |
| 2005/0128,461 Lithographic apparatus and device manufacturing method, and measurement systems | 16 | 2004 | |
| 2006/0139,595 Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness | 12 | 2004 | |
| 7,349,069 Lithographic apparatus and positioning apparatus | 12 | 2005 | |
| 7,161,659 Dual stage lithographic apparatus and device manufacturing method | 35 | 2005 | |
| 7,405,811 Lithographic apparatus and positioning apparatus | 9 | 2005 | |
| 7,292,312 Lithographic apparatus and method for calibrating the same | 14 | 2005 | |
| 7,348,574 Position measurement system and lithographic apparatus | 13 | 2005 | |
| 2006/0227,309 Lithographic apparatus and device manufacturing method | 29 | 2005 | |
| 7,362,446 Position measurement unit, measurement system and lithographic apparatus comprising such position measurement unit | 19 | 2005 | |
| 2007/0076,218 Lithographic apparatus temperature compensation | 14 | 2005 | |
| 2006/0139,660 Lithographic apparatus, device manufacturing method and device manufactured thereby | 17 | 2005 | |
| 7,333,174 Lithographic apparatus and method for determining Z position errors/variations and substrate table flatness | 11 | 2005 | |
| 7,602,489 Lithographic apparatus and device manufacturing method | 9 | 2006 | |
| 7,253,875 Lithographic apparatus and device manufacturing method | 8 | 2006 | |
| 7,636,165 Displacement measurement systems lithographic apparatus and device manufacturing method | 11 | 2006 | |
| 7,483,120 Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method | 11 | 2006 | |
| 2007/0052,976 Position measurement system and lithographic apparatus | 16 | 2006 | |
| 7,619,207 Lithographic apparatus and device manufacturing method | 7 | 2006 | |
| 2008/0240,501 Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable object | 7 | 2007 | |
| 7,710,540 Lithographic apparatus and device manufacturing method | 7 | 2007 | |
| 7,408,655 Lithographic apparatus and method for calibrating the same | 9 | 2007 | |
| 7,528,965 Lithographic apparatus and method for calibrating the same | 8 | 2007 | |
| 2008/0074,681 Lithographic apparatus and method for calibrating the same | 13 | 2007 | |
| 7,859,686 Lithographic apparatus and method for calibrating the same | 6 | 2009 | |
| 7,880,901 Lithographic apparatus and method for calibrating the same | 6 | 2010 | |
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| 4,465,368 Exposure apparatus for production of integrated circuit | 92 | 1981 | |
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| 5,448,332 Exposure method and apparatus | 162 | 1994 | |
| 6,433,872 Exposure method and apparatus | 29 | 1999 | |
| 6,590,634 Exposure apparatus and method | 153 | 2000 | |
| 2002/0041,377 Aerial image measurement method and unit, optical properties measurement method and unit, adjustment method of projection optical system, exposure method and apparatus, making method of exposure apparatus, and device manufacturing method | 129 | 2001 | |
| 2002/0061,469 Projection apparatus, method of manufacturing the apparatus,method of exposure using the apparatus, and method of manufacturing circuit devices by using the apparatus | 78 | 2002 | |
| 6,608,681 Exposure method and apparatus | 59 | 2002 | |
| 7,023,610 Ultraviolet laser apparatus and exposure apparatus using same | 52 | 2003 | |
| 2007/0127,006 Stage drive method and stage unit, exposure apparatus, and device manufacturing method | 16 | 2004 | |
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| 2007/0263,191 Pattern forming apparatus and pattern forming method, movable member drive system and movable member drive method, exposure apparatus and exposure method, and device manufacturing method | 31 | 2007 | |
| 2008/0088,843 Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method | 24 | 2007 | |
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| 5,021,649 Relief diffraction grating encoder | 13 | 1990 | |
| 5,166,754 Alignment system | 15 | 1992 | |
| 5,610,715 Displacement detecting system, an expose apparatus, and a device manufacturing method employing a scale whose displacement is detected by a selected detection head | 39 | 1995 | |
| 5,610,683 Immersion type projection exposure apparatus | 521 | 1995 | |
| 6,819,433 Exposure apparatus including interferometer system | 23 | 2002 | |
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| 4,480,910 Pattern forming apparatus | 466 | 1982 | |
| 5,715,039 Projection exposure apparatus and method which uses multiple diffraction gratings in order to produce a solid state device with fine patterns | 394 | 1996 | |
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| 7,025,498 System and method of measuring thermal expansion | 17 | 2003 | |
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| 6,611,316 Method and system for dual reticle image exposure | 80 | 2002 | |
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| 2005/0271,421 Calibration method for exposure device, exposure method and exposure device | 2 | 2005 | |
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| 4,346,164 Photolithographic method for the manufacture of integrated circuits | 483 | 1980 | |
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| 5,825,043 Focusing and tilting adjustment system for lithography aligner, manufacturing apparatus or inspection apparatus | 498 | 1996 | |
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| 5,247,165 Displacement detecting apparatus using graduated linear scale | 18 | 1992 | |
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| 2006/0231,206 Exposure apparatus and device manufacturing method | 38 | 2006 | |
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| 6,208,407 Method and apparatus for repetitively projecting a mask pattern on a substrate, using a time-saving height measurement | 186 | 1998 | |
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| 5,693,493 Modular assembly of antibody genes, antibodies prepared thereby and use | 31 | 1995 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
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| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Mar 27, 2015 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Mar 27, 2019 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Mar 27, 2023 |
| Fee | Large entity fee | small entity fee | micro entity fee |
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| Surcharge - 3.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |