Method and system for reconstructing aberrated image profiles through simulation
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United States of America Patent
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Sep 27, 2011
Grant Date -
Mar 30, 2006
app pub date -
Feb 20, 2004
filing date -
Feb 20, 2004
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A system and method of calculating estimated image profiles. The system and method includes providing lens characteristic data and performing simulation calculations for various levels of aberration components using the lens characteristic data. A response surface functional relation is built between selected variables of the lens characteristics, in particular the lens aberration components, and the Image Profile using the simulation calculations. Evaluation is then performed on the arbitrary specified aberration values of a lens in relation to the response surface functional relations to provide a calculated estimate of the Image Profile for the specified aberration values. A machine readable medium and exposure apparatus are also provided.
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