Transfer chamber for vacuum processing system
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United States of America Patent
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Oct 11, 2011
Grant Date -
Jul 20, 2006
app pub date -
Mar 21, 2006
filing date -
Jun 21, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body houses at least a portion of a robot adapted to transport a substrate between the processing chamber and the load lock chamber. A lid couples to and seals a top of the main body of the transfer chamber. The transfer chamber also has a domed bottom adapted to couple to and to seal a bottom portion of the main body of the transfer chamber.
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