US Patent No: 8,040,521 - Analytics, PDF, Full Text and PAIR Access

Number of patents in Portfolio can not be more than 2000

Holographic condition assessment system for a structure including a semiconductor material

ALSO PUBLISHED AS: 20100091292

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Abstract

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An improved condition testing system and method integrated into microelectronic circuits includes a structure including a semiconductor material with a target portion and a second portion for determining the presence and nature of various external (e.g. magnetic field, microwave, bioelectric or incident radiation) or internal stresses (e.g. binary circuit-state or analog signal recognition) or conditions acting upon the material. The target portion has a first feature when at least one of the following occurs: an external force is received by the second portion of the structure and an internal condition occurs in the target portion. The system and method further has a test grating determined and shaped and located to produce a first optical interference pattern when the target portion and the grating are exposed to non-invasive illumination and when the target portion has the first feature. Further implementations use one or more diffraction structures, holograms, or holographic optical elements spaced apart from the circuit or electronic device under test to non-invasively optically test in parallel two or more targeted conditions having a shape, size, structure, intensity or orientation of the stress acting upon the material.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
ATTOFEMTO, INC.LAKE OSWEGO, OR15

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Pfaff, Paul L Lake Oswego, OR 19 65

Cited Art Landscape

Patent Info (Count) # Cites Year
 
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6,231,194 Projection system 7 1999
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6,458,495 Transmission and phase balance for phase-shifting mask 34 2000
6,600,760 Method and apparatus for tuning a laser 27 2000
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6,660,649 In-situ balancing for phase-shifting mask 18 2002
6,566,679 Integrated semiconductor superlattice optical modulator 56 2002
6,642,531 Contamination control on lithography components 18 2002
6,687,269 Spread spectrum dither for locking to transmission peak in tunable laser 7 2002
6,724,790 Laser facet phase control 10 2002
 
ATTOFEMTO, INC. (11)
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6,803,777 Voltage testing and measurement 31 2002
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2007/0018,662 CONDITION ASSESSMENT METHOD FOR A STRUCTURE INCLUDING A SEMICONDUCTOR MATERIAL 7 2006
7,728,958 Condition assessment method for a structure including a semiconductor material 18 2007
2008/0186,580 CONDITION ASSESSMENT METHOD FOR A STRUCTURE INCLUDING A SEMICONDUCTOR MATERIAL 7 2007
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2009/0002,717 CONDITION ASSESSMENT SYSTEM FOR A STRUCTURE INCLUDING A SEMICONDUCTOR MATERIAL 6 2008
 
GEORGIA TECH RESEARCH CORPORATION (6)
6,643,025 Microinterferometer for distance measurements 24 2002
6,753,969 Microinterferometer for measuring distance with improved sensitivity 9 2002
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EMCORE CORPORATION (3)
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RCA Corporation (2)
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UNIVERSITY OF ROCHESTER (2)
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ENERGY, UNITED STATES DEPARTMENT OF (1)
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MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
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PFAFF, PAUL (1)
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THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL (1)
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VARINTELLIGENT (BVI) LIMITED (1)
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WRIGHT STATE UNIVERSITY (1)
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Other [Check patent profile for assignment information] (5)
5,165,045 Method and apparatus for measuring displacement having parallel grating lines perpendicular to a displacement direction for diffracting a light beam 13 1991
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2003/0184,761 System and method for surface profiling 6 2002
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Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
ATTOFEMTO, INC. (2)
8,405,823 Optical to optical infrared imaging detection system 1 2011
8,736,823 Methods and processes for optical interferometric or holographic test in the development, evaluation, and manufacture of semiconductor and free-metal devices utilizing anisotropic and isotropic materials 0 2013
 
FEI COMPANY (1)
8,766,214 Method of preparing and imaging a lamella in a particle-optical apparatus 0 2013

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