US Patent No: 8,040,521

Number of patents in Portfolio can not be more than 2000

Holographic condition assessment system for a structure including a semiconductor material

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ALSO PUBLISHED AS: 20100091292
ATTORNEY / AGENT: (SPONSORED)
 

Importance

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Abstract

An improved condition testing system and method integrated into microelectronic circuits includes a structure including a semiconductor material with a target portion and a second portion for determining the presence and nature of various external (e.g. magnetic field, microwave, bioelectric or incident radiation) or internal stresses (e.g. binary circuit-state or analog signal recognition) or conditions acting upon the material. The target portion has a first feature when at least one of the following occurs: an external force is received by the second portion of the structure and an internal condition occurs in the target portion. The system and method further has a test grating determined and shaped and located to produce a first optical interference pattern when the target portion and the grating are exposed to non-invasive illumination and when the target portion has the first feature. Further implementations use one or more diffraction structures, holograms, or holographic optical elements spaced apart from the circuit or electronic device under test to non-invasively optically test in parallel two or more targeted conditions having a shape, size, structure, intensity or orientation of the stress acting upon the material.

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First Claim

Related Publications

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Patent Owner(s)

Patent OwnerAddressTotal Patents
ATTOFEMTO, INC.LAKE OSWEGO, OR13

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Pfaff, Paul L Lake Oswego, OR 12 32

Cited Art

Patent Info (Count) # Cites Year
 
INTEL CORPORATION (42)
6,084,396 Method for performing quantitative measurement of DC and AC current flow in integrated circuit interconnects by the measurement of magnetic fields with a magneto optic laser probe 10 1996
5,895,972 Method and apparatus for cooling the backside of a semiconductor device using an infrared transparent heat slug 59 1996
6,246,098 Apparatus for reducing reflections off the surface of a semiconductor surface 7 1996
6,075,908 Method and apparatus for optically modulating light through the back side of an integrated circuit die 48 1997
5,969,517 Apparatus for performing quantitative measurement of DC and AC current flow in integrated circuit interconnects by measurement of magnetic fields with a magneto optic laser probe 13 1998
5,930,588 Method for testing an integrated circuit device 31 1998
6,251,706 Method for cooling the backside of a semiconductor device using an infrared transparent heat slug 29 1998
6,166,846 Through silicon modulator and method 33 1998
6,269,199 Through silicon modulator and method using polarized light 20 1998
6,323,985 Mosfet through silicon modulator and method 19 1998
6,231,194 Projection system 5 1999
6,374,003 Method and apparatus for optically modulating light through the back side of an integrated circuit die using a plurality of optical beams 10 1999
6,501,092 Integrated semiconductor superlattice optical modulator 60 1999
6,480,641 Method and apparatus for optically modulating light through the back side of an integrated circuit die along the side walls of junctions 7 1999
6,650,802 Method and apparatus for switching an optical beam 11 1999
6,458,495 Transmission and phase balance for phase-shifting mask 31 2000
6,600,760 Method and apparatus for tuning a laser 22 2000
6,421,473 Method and apparatus for switching an optical beam in an integrated circuit die 14 2000
6,434,289 Method and apparatus for confining an optical beam in an optical switch 15 2000
6,449,405 Method and apparatus for switching a plurality of optical beams in an optical switch 5 2000
6,463,193 Method and apparatus for switching an optical beam using a phase array disposed in a higher doped well region 5 2000
6,470,104 Method and apparatus for switching an optical beam by modulating the phase of a portion of the optical beam in a semiconductor substrate 8 2000
6,483,954 Method and apparatus for coupling to regions in an optical modulator 13 2000
6,600,864 Method and apparatus for switching an optical beam using an optical rib waveguide 15 2000
6,816,516 Error signal generation system 13 2001
6,631,146 Tunable laser control system 37 2001
6,658,031 Laser apparatus with active thermal tuning of external cavity 26 2001
6,788,724 Hermetically sealed external cavity laser system and method 15 2001
6,548,417 In-situ balancing for phase-shifting mask 18 2001
6,522,812 Method of precision fabrication by light exposure and structure of tunable waveguide bragg grating 33 2001
6,782,164 Thermally wavelength tunable laser having selectively activated gratings 5 2002
6,785,430 Method and apparatus for integrating an optical transmit module 9 2002
6,751,002 Method and apparatus for semiconductor-based integrated polarization modulator/compensator 6 2002
6,653,161 Method and apparatus for forming a capacitive structure including single crystal silicon 14 2002
6,788,727 Method and apparatus for tunable wavelength conversion using a bragg grating and a laser in a semiconductor substrate 7 2002
6,763,047 External cavity laser apparatus and methods 24 2002
6,778,750 Polarization-insensitive planar lightwave circuits and method for fabricating the same 4 2002
6,660,649 In-situ balancing for phase-shifting mask 16 2002
6,566,679 Integrated semiconductor superlattice optical modulator 54 2002
6,642,531 Contamination control on lithography components 15 2002
6,687,269 Spread spectrum dither for locking to transmission peak in tunable laser 5 2002
6,724,790 Laser facet phase control 8 2002
 
ATTOFEMTO, INC. (11)
2003/0067,312 Voltage testing and measurement 5 2001
6,803,777 Voltage testing and measurement 22 2002
6,972,577 Voltage testing and measurement 6 2003
7,323,889 Voltage testing and measurement 7 2005
7,400,411 Method for optically testing semiconductor devices 5 2006
7,420,687 Condition assessment system for a structure including a semiconductor material 8 2006
2007/0018,662 CONDITION ASSESSMENT METHOD FOR A STRUCTURE INCLUDING A SEMICONDUCTOR MATERIAL 5 2006
7,728,958 Condition assessment method for a structure including a semiconductor material 11 2007
2008/0186,580 CONDITION ASSESSMENT METHOD FOR A STRUCTURE INCLUDING A SEMICONDUCTOR MATERIAL 5 2007
2008/0252,898 METHOD FOR OPTICALLY TESTING SEMICONDUCTOR DEVICES 4 2008
2009/0002,717 CONDITION ASSESSMENT SYSTEM FOR A STRUCTURE INCLUDING A SEMICONDUCTOR MATERIAL 4 2008
 
GEORGIA TECH RESEARCH CORPORATION (6)
6,643,025 Microinterferometer for distance measurements 21 2002
6,753,969 Microinterferometer for measuring distance with improved sensitivity 7 2002
7,068,377 System and method for surface profiling a target object 5 2002
7,116,430 Highly-sensitive displacement-measuring optical device 11 2003
7,440,117 Highly-sensitive displacement-measuring optical device 3 2006
2006/0192,976 Highly-sensitive displacement-measuring optical device 6 2006
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (6)
4,415,851 System for contactless testing of multi-layer ceramics 35 1981
4,703,260 Full chip integrated circuit tester 23 1985
4,786,864 Photon assisted tunneling testing of passivated integrated circuits 10 1986
4,843,329 Method for contactless testing for electrical opens and short circuits in conducting paths in a substrate 32 1987
4,868,492 Method for contactless testing of conducting paths in a substrate using photo-assisted tunneling 32 1987
4,999,577 Method for contactless testing of conducting paths in a substrate using photon-assisted tunneling 29 1989
 
EMCORE CORPORATION (3)
6,804,278 Evaluation and adjustment of laser losses according to voltage across gain medium 9 2001
6,822,979 External cavity laser with continuous tuning of grid generator 18 2001
6,665,321 Tunable laser operation with locally commensurate condition 26 2002
 
PHOTON DYNAMICS, INC. (3)
4,875,006 Ultra-high-speed digital test system using electro-optic signal sampling 46 1988
4,983,911 Voltage imaging system using electro-optics 42 1990
5,570,011 Method for testing an electronic device using voltage imaging 8 1994
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (2)
4,970,461 Method and apparatus for non-contact opens/shorts testing of electrical circuits 25 1989
5,407,850 SOI transistor threshold optimization by use of gate oxide having positive charge 6 1993
 
RCA CORPORATION (2)
4,188,123 Optically measuring the carrier concentration in a semiconductor 14 1978
4,211,488 Optical testing of a semiconductor 35 1978
 
TEXAS INSTRUMENTS INCORPORATED (2)
5,059,897 Method and apparatus for testing passive substrates for integrated circuit mounting 26 1989
5,422,723 Diffraction gratings for submicron linewidth measurement 17 1992
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
4,681,449 High speed testing of electronic circuits by electro-optic sampling 51 1984
4,758,092 Method and means for optical detection of charge density modulation in a semiconductor 98 1986
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE (2)
4,242,635 Apparatus and method for integrated circuit test analysis 46 1979
4,355,278 Method for testing and analyzing surface acoustic wave interdigital transducers 33 1980
 
UNIVERSITY OF ROCHESTER (2)
4,618,819 Measurement of electrical signals with subpicosecond resolution 81 1984
4,745,361 Electro-optic measurement (network analysis) system 16 1987
 
BELL TELEPHONE LABORATORIES, INCORPORATED (1)
4,482,863 Apparatus and method for measuring electronic response of high speed devices and materials 23 1981
 
DAVIS WRIGHT TREMAINE, LLP/SEATTLE (1)
7,206,078 Non-destructive testing system using a laser beam 8 2002
 
ENERGY, UNITED STATES DEPARTMENT OF (1)
4,896,109 Photoconductive circuit element reflectometer 60 1987
 
FARFIELD GROUP LIMITED (1)
6,218,194 Analytical methods and apparatus employing an optical sensor device with refractive index modulation 98 1999
 
FREESCALE SEMICONDUCTOR, INC. (1)
4,760,249 Logic array having multiple optical logic inputs 12 1986
 
HAMAMATSU PHOTONICS K.K. (1)
5,034,683 Voltage detecting device 34 1990
 
HOLOPLEX, INC. (1)
5,438,439 Non-destructive readout mechanism for volume holograms using two wavelengths 30 1993
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (1)
2009/0147,334 MULTI-COLOR OFF-AXIS DIGITAL HOLOGRAPHIC SYSTEM AND THE IMAGING METHOD THEREOF 4 2008
 
KABUSHIKI KAISHA TOSHIBA (1)
4,881,029 Semiconductor integrated circuit devices and methods for testing same 24 1986
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
6,172,752 Method and apparatus for simultaneously interferometrically measuring optical characteristics in a noncontact manner 47 1997
 
METROLASER, A CALIFORNIA CORPORATION (1)
5,682,236 Remote measurement of near-surface physical properties using optically smart surfaces 27 1993
 
MIDDLEFIELD VENTURES, INC. (1)
6,778,102 Communication system and apparatus with synchronous orthogonal coding 10 2000
 
NEW EOCUS, INC. (1)
6,704,332 Tunable external cavity laser 12 2002
 
NORTHROP GRUMMAN CORPORATION (1)
4,714,826 Apparatus and method for testing outputs of logic circuits by modulating optical sequals 9 1986
 
ORGANISATION EUROPEENNE POUR LA RECHERCHE NUCLEAIRE (1)
4,933,634 Device and method to measure a short radiation pulse or an electric pulse 61 1989
 
PFAFF, PAUL (1)
6,512,385 Method for testing a device under test including the interference of two beams 30 2000
 
PIONEER ELECTRONIC CORPORATION (1)
6,218,655 Optical pickup 11 1999
 
SEMITEST, INC. (1)
4,827,212 Noninvasive method and apparatus for characterization of semiconductors 42 1988
 
SIEMENS AKTIENGESELLSCHAFT (1)
4,554,453 Apparatus for recording X-ray images 27 1984
 
TAITEC, INC. (1)
7,268,860 Color Moire interferometry 2 2004
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY (1)
4,953,983 Non-destructively measuring local carrier concentration and gap energy in a semiconductor 9 1988
 
THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL (1)
5,216,359 Electro-optical method and apparatus for testing integrated circuits 31 1991
 
VARINTELLIGENT (BVI) LIMITED (1)
5,999,152 Electro-Optic display providing a grey scale by utilizing voltage dependent birefringence 11 1997
 
WRIGHT STATE UNIVERSITY (1)
4,816,755 Method and apparatus for measuring photoresistivity and photo hall-effect of semiconductor wafers 23 1988
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (5)
5,165,045 Method and apparatus for measuring displacement having parallel grating lines perpendicular to a displacement direction for diffracting a light beam 12 1991
5,995,223 Apparatus for rapid phase imaging interferometry and method therefor 54 1998
6,163,378 Spectroscopic time integrative correlation for rapid medical diagnostic and universal image analysis 12 1999
2003/0184,761 System and method for surface profiling 5 2002
2005/0036,151 Method and device for opically testing semiconductor elements 7 2004

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
ATTOFEMTO, INC. (1)
8,405,823 Optical to optical infrared imaging detection system 0 2011

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