Holographic condition assessment system for a structure including a semiconductor material

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8040521
APP PUB NO 20100091292A1
SERIAL NO

12422210

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An improved condition testing system and method integrated into microelectronic circuits includes a structure including a semiconductor material with a target portion and a second portion for determining the presence and nature of various external (e.g. magnetic field, microwave, bioelectric or incident radiation) or internal stresses (e.g. binary circuit-state or analog signal recognition) or conditions acting upon the material. The target portion has a first feature when at least one of the following occurs: an external force is received by the second portion of the structure and an internal condition occurs in the target portion. The system and method further has a test grating determined and shaped and located to produce a first optical interference pattern when the target portion and the grating are exposed to non-invasive illumination and when the target portion has the first feature. Further implementations use one or more diffraction structures, holograms, or holographic optical elements spaced apart from the circuit or electronic device under test to non-invasively optically test in parallel two or more targeted conditions having a shape, size, structure, intensity or orientation of the stress acting upon the material.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
ATTOFEMTO, INC.LAKE OSWEGO, OR18

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Pfaff, Paul L Lake Oswego, US 15 117

Cited Art Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (5)
* 5165045 Method and apparatus for measuring displacement having parallel grating lines perpendicular to a displacement direction for diffracting a light beam 15 1991
5995223 Apparatus for rapid phase imaging interferometry and method therefor 118 1998
6163378 Spectroscopic time integrative correlation for rapid medical diagnostic and universal image analysis 21 1999
* 2003/0184,761 System and method for surface profiling 8 2002
2005/0036,151 Method and device for opically testing semiconductor elements 18 2004
 
MICRON TECHNOLOGY, INC. (1)
6650802 Method and apparatus for switching an optical beam 19 1999
 
FREESCALE SEMICONDUCTOR, INC. (1)
4760249 Logic array having multiple optical logic inputs 17 1986
 
FARFIELD GROUP LIMITED (1)
6218194 Analytical methods and apparatus employing an optical sensor device with refractive index modulation 115 1999
 
HAMAMATSU PHOTONICS K.K. (1)
5034683 Voltage detecting device 39 1990
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (1)
2009/0147,334 MULTI-COLOR OFF-AXIS DIGITAL HOLOGRAPHIC SYSTEM AND THE IMAGING METHOD THEREOF 9 2008
 
Semitest, Inc. (1)
4827212 Noninvasive method and apparatus for characterization of semiconductors 48 1988
 
WRIGHT STATE UNIVERSITY (1)
4816755 Method and apparatus for measuring photoresistivity and photo hall-effect of semiconductor wafers 28 1988
 
COMMISSARIAT A L'ENERGIE ATOMIQUE (1)
4933634 Device and method to measure a short radiation pulse or an electric pulse 66 1989
 
THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL (1)
5216359 Electro-optical method and apparatus for testing integrated circuits 41 1991
 
UNIVERSITY OF ROCHESTER (2)
4618819 Measurement of electrical signals with subpicosecond resolution 86 1984
4745361 Electro-optic measurement (network analysis) system 21 1987
 
HOLOPLEX, INC. (1)
5438439 Non-destructive readout mechanism for volume holograms using two wavelengths 37 1993
 
NEW EOCUS, INC. (1)
6704332 Tunable external cavity laser 19 2002
 
The United States of America as represented by the United States Department of Energy (1)
4896109 Photoconductive circuit element reflectometer 65 1987
 
PHOTON DYNAMICS, INC. (3)
4875006 Ultra-high-speed digital test system using electro-optic signal sampling 52 1988
4983911 Voltage imaging system using electro-optics 53 1990
5570011 Method for testing an electronic device using voltage imaging 18 1994
 
Taitec, Inc. (1)
* 7268860 Color Moire interferometry 4 2004
 
DAVIS WRIGHT TREMAINE, LLP (1)
7206078 Non-destructive testing system using a laser beam 13 2002
 
KABUSHIKI KAISHA TOSHIBA (1)
4881029 Semiconductor integrated circuit devices and methods for testing same 29 1986
 
NORTHROP GRUMMAN CORPORATION (1)
4714826 Apparatus and method for testing outputs of logic circuits by modulating optical sequals 14 1986
 
BELL TELEPHONE LABORATORIES, INCORPORATED (1)
4482863 Apparatus and method for measuring electronic response of high speed devices and materials 28 1981
 
The United States of America as represented by the Secretary of the Air Force (1)
4355278 Method for testing and analyzing surface acoustic wave interdigital transducers 38 1980
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (6)
4415851 System for contactless testing of multi-layer ceramics 42 1981
4703260 Full chip integrated circuit tester 28 1985
4786864 Photon assisted tunneling testing of passivated integrated circuits 15 1986
4843329 Method for contactless testing for electrical opens and short circuits in conducting paths in a substrate 37 1987
4868492 Method for contactless testing of conducting paths in a substrate using photo-assisted tunneling 37 1987
4999577 Method for contactless testing of conducting paths in a substrate using photon-assisted tunneling 34 1989
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (2)
4970461 Method and apparatus for non-contact opens/shorts testing of electrical circuits 33 1989
5407850 SOI transistor threshold optimization by use of gate oxide having positive charge 11 1993
 
SIEMENS AKTIENGESELLSCHAFT (1)
4554453 Apparatus for recording X-ray images 32 1984
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
4681449 High speed testing of electronic circuits by electro-optic sampling 61 1984
4758092 Method and means for optical detection of charge density modulation in a semiconductor 109 1986
 
BEIJING XIAOMI MOBILE SOFTWARE CO., LTD. (1)
6751002 Method and apparatus for semiconductor-based integrated polarization modulator/compensator 12 2002
 
Pioneer Electronic Corporation (1)
6218655 Optical pickup 16 1999
 
ATTOFEMTO, INC. (12)
6512385 Method for testing a device under test including the interference of two beams 43 2000
2003/0067,312 Voltage testing and measurement 12 2001
6803777 Voltage testing and measurement 45 2002
6972577 Voltage testing and measurement 11 2003
7323889 Voltage testing and measurement 13 2005
7400411 Method for optically testing semiconductor devices 10 2006
7420687 Condition assessment system for a structure including a semiconductor material 18 2006
2007/0018,662 CONDITION ASSESSMENT METHOD FOR A STRUCTURE INCLUDING A SEMICONDUCTOR MATERIAL 10 2006
* 7728958 Condition assessment method for a structure including a semiconductor material 26 2007
2008/0186,580 CONDITION ASSESSMENT METHOD FOR A STRUCTURE INCLUDING A SEMICONDUCTOR MATERIAL 9 2007
2008/0252,898 METHOD FOR OPTICALLY TESTING SEMICONDUCTOR DEVICES 11 2008
* 2009/0002,717 CONDITION ASSESSMENT SYSTEM FOR A STRUCTURE INCLUDING A SEMICONDUCTOR MATERIAL 9 2008
 
Varintelligent (BVI) Limited (1)
5999152 Electro-Optic display providing a grey scale by utilizing voltage dependent birefringence 16 1997
 
INTEL CORPORATION (40)
6084396 Method for performing quantitative measurement of DC and AC current flow in integrated circuit interconnects by the measurement of magnetic fields with a magneto optic laser probe 18 1996
5895972 Method and apparatus for cooling the backside of a semiconductor device using an infrared transparent heat slug 72 1996
6246098 Apparatus for reducing reflections off the surface of a semiconductor surface 12 1996
6075908 Method and apparatus for optically modulating light through the back side of an integrated circuit die 60 1997
5969517 Apparatus for performing quantitative measurement of DC and AC current flow in integrated circuit interconnects by measurement of magnetic fields with a magneto optic laser probe 19 1998
5930588 Method for testing an integrated circuit device 45 1998
6251706 Method for cooling the backside of a semiconductor device using an infrared transparent heat slug 41 1998
6166846 Through silicon modulator and method 38 1998
6269199 Through silicon modulator and method using polarized light 29 1998
6323985 Mosfet through silicon modulator and method 26 1998
6231194 Projection system 15 1999
6374003 Method and apparatus for optically modulating light through the back side of an integrated circuit die using a plurality of optical beams 16 1999
6501092 Integrated semiconductor superlattice optical modulator 73 1999
6480641 Method and apparatus for optically modulating light through the back side of an integrated circuit die along the side walls of junctions 14 1999
6458495 Transmission and phase balance for phase-shifting mask 40 2000
6600760 Method and apparatus for tuning a laser 31 2000
6421473 Method and apparatus for switching an optical beam in an integrated circuit die 20 2000
6434289 Method and apparatus for confining an optical beam in an optical switch 21 2000
6449405 Method and apparatus for switching a plurality of optical beams in an optical switch 11 2000
6463193 Method and apparatus for switching an optical beam using a phase array disposed in a higher doped well region 10 2000
6470104 Method and apparatus for switching an optical beam by modulating the phase of a portion of the optical beam in a semiconductor substrate 13 2000
6483954 Method and apparatus for coupling to regions in an optical modulator 19 2000
6600864 Method and apparatus for switching an optical beam using an optical rib waveguide 20 2000
6816516 Error signal generation system 26 2001
6631146 Tunable laser control system 49 2001
6658031 Laser apparatus with active thermal tuning of external cavity 35 2001
6788724 Hermetically sealed external cavity laser system and method 20 2001
6548417 In-situ balancing for phase-shifting mask 26 2001
6522812 Method of precision fabrication by light exposure and structure of tunable waveguide bragg grating 40 2001
6782164 Thermally wavelength tunable laser having selectively activated gratings 13 2002
6785430 Method and apparatus for integrating an optical transmit module 22 2002
6653161 Method and apparatus for forming a capacitive structure including single crystal silicon 28 2002
6788727 Method and apparatus for tunable wavelength conversion using a bragg grating and a laser in a semiconductor substrate 13 2002
6763047 External cavity laser apparatus and methods 37 2002
6778750 Polarization-insensitive planar lightwave circuits and method for fabricating the same 9 2002
6660649 In-situ balancing for phase-shifting mask 22 2002
6566679 Integrated semiconductor superlattice optical modulator 65 2002
6642531 Contamination control on lithography components 22 2002
6687269 Spread spectrum dither for locking to transmission peak in tunable laser 11 2002
6724790 Laser facet phase control 13 2002
 
NEOPHOTONICS CORPORATION (3)
6804278 Evaluation and adjustment of laser losses according to voltage across gain medium 15 2001
6822979 External cavity laser with continuous tuning of grid generator 26 2001
6665321 Tunable laser operation with locally commensurate condition 42 2002
 
METROLASER, A CALIFORNIA CORPORATION (1)
5682236 Remote measurement of near-surface physical properties using optically smart surfaces 36 1993
 
MIDDLEFIELD VENTURES, INC. (1)
6778102 Communication system and apparatus with synchronous orthogonal coding 16 2000
 
The United States of America as represented by the Secretary of the Navy (1)
4953983 Non-destructively measuring local carrier concentration and gap energy in a semiconductor 14 1988
 
TEXAS INSTRUMENTS INCORPORATED (2)
5059897 Method and apparatus for testing passive substrates for integrated circuit mounting 31 1989
5422723 Diffraction gratings for submicron linewidth measurement 22 1992
 
GEORGIA TECH RESEARCH CORPORATION (6)
* 6643025 Microinterferometer for distance measurements 25 2002
* 6753969 Microinterferometer for measuring distance with improved sensitivity 10 2002
* 7068377 System and method for surface profiling a target object 7 2002
* 7116430 Highly-sensitive displacement-measuring optical device 18 2003
* 7440117 Highly-sensitive displacement-measuring optical device 9 2006
* 2006/0192,976 Highly-sensitive displacement-measuring optical device 14 2006
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
6172752 Method and apparatus for simultaneously interferometrically measuring optical characteristics in a noncontact manner 57 1997
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (1)
* 2014/0007,307 METHOD OF PREPARING AND IMAGING A LAMELLA IN A PARTICLE-OPTICAL APPARATUS 5 2013
 
HYPRES, INC. (1)
9618591 Magnetic resonance system and method employing a digital squid 0 2016
 
FEI COMPANY (1)
* 8766214 Method of preparing and imaging a lamella in a particle-optical apparatus 2 2013
 
ATTOFEMTO, INC. (4)
* 8405823 Optical to optical infrared imaging detection system 3 2011
8736823 Methods and processes for optical interferometric or holographic test in the development, evaluation, and manufacture of semiconductor and free-metal devices utilizing anisotropic and isotropic materials 2 2013
9366719 Optical to optical methods enhancing the sensitivity and resolution of ultraviolet, electron beam and ion beam devices 0 2013
* 2016/0291,088 ADVANCED 4-DIMENSIONAL SIGNAL AND DEVICE TESTING USING CIRCUIT-STATE RECOGNITION 0 2016
 
EXFO INC. (1)
9733616 Portable digital holographic probe for the inspection of optical fiber connectors, and inspection system and method for the same 0 2012
* Cited By Examiner

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