Displacement sensor
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United States of America Patent
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Oct 18, 2011
Grant Date -
Sep 16, 2010
app pub date -
Feb 25, 2010
filing date -
Mar 13, 2009
priority date (Note) -
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status (Latency Note)
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Abstract
A focused image is taken around the focal point by a confocal displacement meter. In a measurement apparatus, a confocal displacement meter system OPT-A includes a laser diode 1, a collimator lens 4, an objective lens 6, a half mirror 3, a diaphragm plate 31, and a photodiode 2. An observation image imaging system OPT-B is a telecentric light receiving optical system, and the observation image imaging system OPT-B includes a white light source 94, an objective lens 6, a dichroic mirror 5, a diaphragm plate 81, an image formation lens 82, and an image sensor 9. The collimator lens 4 is swept by an oscillator 7 in a two-headed arrow direction. A diameter of a diaphragm hole of the diaphragm plate 81 is set such that a depth of field of the objective lens 6 is not lower than sweep amplitude of the collimator lens 4.
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