Methods and systems for determining a position of inspection data in design data space
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United States of America Patent
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Oct 18, 2011
Grant Date -
Oct 4, 2007
app pub date -
Jun 7, 2007
filing date -
Nov 18, 2005
priority date (Note) -
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Abstract
Various methods and systems for determining a position of inspection data in design data space are provided. One computer-implemented method includes determining a centroid of an alignment target formed on a wafer using an image of the alignment target acquired by imaging the wafer. The method also includes aligning the centroid to a centroid of a geometrical shape describing the alignment target. In addition, the method includes assigning a design data space position of the centroid of the alignment target as a position of the centroid of the geometrical shape in the design data space. The method further includes determining a position of inspection data acquired for the wafer in the design data space based on the design data space position of the centroid of the alignment target.
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