Acceleration sensor
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United States of America Patent
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Oct 25, 2011
Grant Date -
Apr 29, 2010
app pub date -
Dec 29, 2009
filing date -
Dec 20, 2004
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An acceleration sensor has a semiconductor acceleration sensor chip and a case. The semiconductor acceleration sensor chip has a fixed portion, a plummet portion surrounding the fixed portion without contacting the fixed portion, and a beam portion connecting the fixed portion and the plummet portion, the thickness of the beam portion being thinner than the thickness of the fixed portion. The case has a cavity housing the semiconductor acceleration sensor chip, and a projection portion formed on the bottom face of the cavity, the bottom face of the fixed portion being fixed to the top face of the projection portion.
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