Process for preparing trichloromonosilane
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United States of America Patent
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Oct 25, 2011
Grant Date -
Oct 13, 2005
app pub date -
Apr 1, 2005
filing date -
Apr 8, 2004
priority date (Note) -
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Abstract
A process for preparing trichloromonosilane, in which silicon particles are reacted with hydrogen chloride in a fluidized bed reactor, wherein the silicon particles used are a silicon dust which is obtained as a waste product in the preparation of defined silicon particle size fractions from lump-form silicon and the silicon dust is introduced directly into the reactor.
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