Method and apparatus for depositing chalcogens
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United States of America Patent
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Nov 1, 2011
Grant Date -
May 14, 2009
app pub date -
Sep 11, 2008
filing date -
Sep 11, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method and device for separation of chalcogens from waste gases in process installations are provided so that complete and reliable removal of chalcogens occurs continuously during nonstop operation of the process installation in the most effective manner possible. The process installation is connected via a pipeline to an input connector of the device for separation of chalcogens arranged outside of the process installation. The pipeline and the input connector have a heat connection to the process chamber. The device for separation of chalcogens is provided with an outlet connector as well as a gas outlet is equipped with a cooling device so that the input connector is excluded from cooling.
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