Method of reducing porosity in thermal spray coated and sintered articles
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United States of America Patent
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Nov 8, 2011
Grant Date -
Apr 2, 2009
app pub date -
Dec 10, 2008
filing date -
Nov 2, 2005
priority date (Note) -
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Abstract
This invention relates to an article having a reduced porosity and a method for sealing porosity of at least a portion of an outer porous surface of an article, said method comprising (i) applying a sealant solution on the outer porous surface of said article, (ii) infiltrating at least a portion of the outer porous surface with said sealant solution, and (iii) allowing the infiltrated sealant solution to react, thereby forming an infiltrated solid precipitate, said infiltrated solid precipitate sealing the porosity of at least a portion of the outer porous surface of said article. The method is useful, for example, in the protection of integrated circuit manufacturing equipment, internal chamber components, and electrostatic chuck manufacture.
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