Method of manufacturing magnetic head for perpendicular magnetic recording including two side shields
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United States of America Patent
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Nov 15, 2011
Grant Date -
Feb 24, 2011
app pub date -
Aug 19, 2009
filing date -
Aug 19, 2009
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A magnetic head includes a pole layer, first and second side shields, and an encasing layer having a pole groove that accommodates the pole layer and first and second side shield grooves that accommodate the first and second side shields. In a manufacturing method for the magnetic head, the pole groove and first and second initial side shield grooves are formed in a nonmagnetic layer using an etching mask layer having first to third openings. In the manufacturing method, a wall face of the first initial side shield groove that is closer to the pole groove and a wall face of the second initial side shield groove that is closer to the pole groove are etched by dry etching to thereby complete the first and second side shield grooves.
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