Self-aligned contact set

United States of America Patent

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Nov 15, 2011
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Oct 21, 2010
app pub date
Jun 29, 2010
filing date
Mar 5, 2007

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Abstract

A self-aligned contact includes a lower contact disposed in a dielectric layer of a substrate and an upper contact disposed in the dielectric layer and directly on the lower contact, and electrically connected to the lower contact. The profile of the upper contact and the lower contact is zigzag.

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Patent Owner(s)

Patent Owner	Address
MARLIN SEMICONDUCTOR LIMITED	BRACKEN ROAD SANDYFORD FIRST FLOOR BLACKTHORN EXCHANGE DUBLIN D18 P3Y9

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Yang, Chan-Lon	Taipei, TW	147	2452

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Self-aligned contact set

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United States of America Patent

12825515

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PATENT NO	8058733
APP PUB NO	20100264550A1
SERIAL NO	12825515
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
November 15, 2011	US,8058733,B2 US8058733B2	GRANTED PATENT AS SECOND PUBLICATION
October 21, 2010	US,20100264550,A1 US20100264550A1	FIRST PUBLISHED PATENT APPLICATION

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12825515

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