Micro-machining dust removing device, micro-machining apparatus, and micro-machining dust removing method
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United States of America Patent
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Nov 22, 2011
Grant Date -
Jun 5, 2008
app pub date -
Jun 4, 2007
filing date -
Jun 5, 2006
priority date (Note) -
Expired
status (Latency Note)
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Abstract
There is a micro-machining apparatus for removing the micro-machining dust generated at the time of machining while a workpiece M is machined within a liquid W using a probe tip. The apparatus includes a stage on which the workpiece is to be placed; a probe having the probe tip, a machining device having a moving means that moves the stage and the probe relative to each other to machine the workpiece by the probe tip, and a micro-machining dust removing device having a first electrode and a second electrode that are arranged in the liquid so as to sandwich the probe tip therebetween, and a voltage application means that applies a voltage to between both the electrodes to move the micro-machining dust in the liquid.
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