Mirror device and MEMS device comprising layered electrode
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United States of America Patent
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Nov 22, 2011
Grant Date -
Feb 25, 2010
app pub date -
Oct 30, 2009
filing date -
Nov 1, 2003
priority date (Note) -
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Abstract
The present invention provides an image display system implemented with a micro-electromechanical system (MEMS) device formed and supported on a substrate functioning as a spatial light modulator wherein the MEMS device further comprises a drive circuit disposed on the substrate; a micromirror functioning as a movable electrode supported on a deflectable hinge extended from the substrate; a stationary electrode disposed on the substrate and connected to the drive circuit to receive signals therefrom, wherein the stationary electrode comprises a first electrode, a second electrode and an insulation layer, wherein the insulation layer is disposed between the first electrode and second electrode.
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