Substrate processing sequence in a Cartesian robot cluster tool
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United States of America Patent
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Nov 29, 2011
Grant Date -
Nov 4, 2010
app pub date -
Jul 20, 2010
filing date -
Dec 22, 2005
priority date (Note) -
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Abstract
A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, the second motion assembly being coupled to the first motion assembly and being movable relative to the first motion assembly in a second direction that is generally orthogonal to the first direction. The robot assembly further comprises an enclosure disposed in one of the first motion assembly or the second motion assembly, an actuator within the enclosure, and a fan assembly disposed in the enclosure that is adapted to generate a pressure within the enclosure that is less than a pressure outside of the enclosure.
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