Electrically conductive structure on a semiconductor substrate formed from printing

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United States of America Patent

PATENT NO 8067305
SERIAL NO

12231457

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Provided are methods for forming an electrically conductive structure of a desired three-dimensional shape on a substantially planar surface of a substrate, e.g., a semiconductor wafer. Typically, the particulate matter is deposited in a layer-by-layer manner and adhered to selected regions on the substrate surface. The particulate matter may be deposited to produce a mold for forming the structure and/or to produce the structure itself. A three-dimensional printer with associated electronic data may be used without the need of a lithographic mask or reticle.

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Patent Owner(s)

  • ULTRATECH, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hawryluk, Andrew M Los Altos Hills, US 82 2591
Zafiropoulo, Arthur W Atherton, US 29 1283

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