US Patent No: 8,068,269

Number of patents in Portfolio can not be more than 2000

Microelectromechanical device with spacing layer

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ALSO PUBLISHED AS: 20100014148
ATTORNEY / AGENT: (SPONSORED)
 

Importance

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Abstract

An interferometric modulating device is provided with a spacing layer positioned between the fixed reflector and the electrode. The spacing layer prevents shorting between the movable reflector and the electrode and provides a filtering cavity to improve color saturation.

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First Claim

Related Publications

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA589

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Djordjev, Kostadin San Jose, CA 26 64

Cited Art

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (143)
6,040,937 Interferometric modulation 573 1996
6,674,562 Interferometric modulation of radiation 596 1998
6,055,090 Interferometric modulation 423 1999
7,123,216 Photonic MEMS and structures 482 1999
6,867,896 Interferometric modulation of radiation 364 2001
6,680,792 Interferometric modulation of radiation 457 2001
6,650,455 Photonic mems and structures 455 2001
2002/0075,555 Interferometric modulation of radiation 387 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 349 2002
6,710,908 Controlling micro-electro-mechanical cavities 307 2002
7,126,738 Visible spectrum modulator arrays 116 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 399 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 272 2002
6,912,022 Optical interference color display and optical interference modulator 227 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 93 2003
7,460,291 Separable modulator 42 2003
6,982,820 Color changeable pixel 144 2003
7,198,973 Method for fabricating an interference display unit 89 2003
2004/0209,195 Method for fabricating an interference display unit 209 2003
6,870,654 Structure of a structure release and a method for manufacturing the same 188 2003
6,882,458 Structure of an optical interference display cell 228 2003
2004/0240,032 Interferometric modulation of radiation 290 2004
7,119,945 Altering temporal response of microelectromechanical elements 120 2004
6,958,847 Structure of an optical interference display unit 198 2004
6,882,461 Micro electro mechanical system display cell and method for fabricating thereof 190 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 218 2004
2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 215 2004
6,952,303 Interferometric modulation pixels and manufacturing method thereof 187 2004
7,476,327 Method of manufacture for microelectromechanical devices 29 2004
6,980,350 Optical interference reflective element and repairing and manufacturing methods thereof 132 2004
2005/0195,462 Interference display plate and manufacturing method thereof 226 2004
7,006,272 Color changeable pixel 108 2004
2006/0007,517 Structure of a micro electro mechanical system 80 2004
2006/0066,640 Display region architectures 66 2005
7,184,202 Method and system for packaging a MEMS device 73 2005
7,289,259 Conductive bus structure for interferometric modulator array 55 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 37 2005
7,321,456 Method and device for corner interferometric modulation 32 2005
7,372,613 Method and device for multistate interferometric light modulation 63 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 29 2005
7,527,995 Method of making prestructure for MEMS systems 20 2005
2006/0066,599 Reflective display pixels arranged in non-rectangular arrays 61 2005
7,460,292 Interferometric modulator with internal polarization and drive method 19 2005
2006/0065,940 Analog interferometric modulator device 72 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 18 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 53 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 19 2005
2006/0024,880 System and method for micro-electromechanical operation of an interferometric modulator 109 2005
2006/0077,156 MEMS device having deformable membrane characterized by mechanical persistence 59 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 10 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 144 2005
7,564,612 Photonic MEMS and structures 53 2005
2006/0066,641 Method and device for manipulating color in a display 58 2005
2006/0066,936 Interferometric optical modulator using filler material and method 49 2005
2006/0067,633 Device and method for wavelength filtering 29 2005
2006/0066,938 Method and device for multistate interferometric light modulation 37 2005
7,236,284 Photonic MEMS and structures 82 2005
7,550,810 MEMS device having a layer movable at asymmetric rates 19 2006
7,532,377 Movable micro-electromechanical device 28 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 74 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 60 2006
2007/0279,729 Analog interferometric modulator device with electrostatic actuation and release 33 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 42 2006
2008/0055,707 Support structure for free-standing MEMS device and methods for forming the same 32 2006
7,554,711 MEMS devices with stiction bumps 30 2006
2006/0262,126 Transparent thin films 41 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 24 2006
7,898,722 Microelectromechanical device with restoring electrode 26 2006
7,629,197 Spatial light modulator 27 2006
2008/0094,690 Spatial Light Modulator 34 2006
7,385,762 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 40 2006
7,535,621 Aluminum fluoride films for microelectromechanical system applications 23 2006
2008/0158,645 ALUMINUM FLUORIDE FILMS FOR MICROELECTROMECHANICAL SYSTEM APPLICATIONS 21 2006
2007/0285,761 MEMS device with integrated optical element 46 2007
2007/0121,118 White interferometric modulators and methods for forming the same 42 2007
2007/0177,247 Method and device for modulating light with multiple electrodes 74 2007
2008/0239,455 MICROELECTROMECHANICAL DEVICE AND METHOD UTILIZING CONDUCTING LAYERS SEPARATED BY STOPS 27 2007
2007/0253,054 DISPLAY DEVICES COMPRISING OF INTERFEROMETRIC MODULATOR AND SENSOR 53 2007
2008/0278,787 MICROELECTROMECHANICAL SYSTEM HAVING A DIELECTRIC MOVABLE MEMBRANE AND A MIRROR 26 2007
2008/0278,788 MICROELECTROMECHANICAL SYSTEM HAVING A DIELECTRIC MOVABLE MEMBRANE AND A MIRROR 27 2007
2008/0316,566 HIGH APERTURE-RATIO TOP-REFLECTIVE AM-IMOD DISPLAYS 22 2007
2008/0316,568 INFRARED AND DUAL MODE DISPLAYS 20 2007
7,569,488 Methods of making a MEMS device by monitoring a process parameter 21 2007
7,612,932 Microelectromechanical device with optical function separated from mechanical and electrical function 14 2007
7,630,121 Electromechanical device with optical function separated from mechanical and electrical function 9 2007
2008/0013,145 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 44 2007
2008/0186,581 MODULATING THE INTENSITY OF LIGHT FROM AN INTERFEROMETRIC REFLECTOR 33 2007
2008/0037,093 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 81 2007
2008/0088,904 Method and device for modulating light with semiconductor substrate 81 2007
2008/0088,910 SYSTEM AND METHOD FOR A MEMS DEVICE 75 2007
2008/0088,911 SYSTEM AND METHOD FOR A MEMS DEVICE 78 2007
2008/0088,912 SYSTEM AND METHOD FOR A MEMS DEVICE 81 2007
2008/0106,782 SYSTEM AND METHOD FOR A MEMS DEVICE 80 2007
7,492,503 System and method for multi-level brightness in interferometric modulation 19 2007
2008/0080,043 CONDUCTIVE BUS STRUCTURE FOR INTERFEROMETRIC MODULATOR ARRAY 43 2007
7,542,198 Device having a conductive light absorbing mask and method for fabricating same 19 2007
2008/0055,706 REFLECTIVE DISPLAY DEVICE HAVING VIEWABLE DISPLAY ON BOTH SIDES 51 2007
2009/0122,384 CAPACITIVE MEMS DEVICE WITH PROGRAMMABLE OFFSET VOLTAGE CONTROL 7 2007
2009/0073,539 PERIODIC DIMPLE ARRAY 16 2007
2009/0078,316 INTERFEROMETRIC PHOTOVOLTAIC CELL 23 2007
2009/0293,955 PHOTOVOLTAICS WITH INTERFEROMETRIC MASKS 26 2007
2009/0147,343 MEMS DEVICES REQUIRING NO MECHANICAL SUPPORT 14 2007
7,561,321 Process and structure for fabrication of MEMS device having isolated edge posts 16 2007
2009/0101,192 PHOTOVOLTAIC DEVICES WITH INTEGRATED COLOR INTERFEROMETRIC FILM STACKS 28 2007
2009/0073,534 INTERFEROMETRIC MODULATOR DISPLAY DEVICES 18 2008
2008/0110,855 METHODS AND DEVICES FOR INHIBITING TILTING OF A MIRROR IN AN INTERFEROMETRIC MODULATOR 47 2008
2008/0112,035 METHODS AND DEVICES FOR INHIBITING TILTING OF A MOVABLE ELEMENT IN A MEMS DEVICE 40 2008
7,515,327 Method and device for corner interferometric modulation 10 2008
2009/0231,666 Microelectromechanical device with thermal expansion balancing layer or stiffening layer 13 2008
7,612,933 Microelectromechanical device with spacing layer 16 2008
2009/0251,761 MICROELECTROMECHANICAL SYSTEMS DISPLAY ELEMENT WITH PHOTOVOLTAIC STRUCTURE 20 2008
2009/0257,105 DEVICE HAVING THIN BLACK MASK AND METHOD OF FABRICATING THE SAME 13 2008
2008/0247,028 METHOD AND DEVICE FOR MULTISTATE INTERFEROMETRIC LIGHT MODULATION 38 2008
7,813,029 Devices and methods for enhancing color shift of interferometric modulators 17 2008
7,855,826 Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices 6 2008
7,848,003 Semi-transparent/transflective lighted interferometric devices 9 2008
2009/0103,166 ADJUSTABLY TRANSMISSIVE MEMS-BASED DEVICES 23 2008
2009/0068,781 METHOD OF MANUFACTURE FOR MICROELECTROMECHANICAL DEVICES 48 2008
2009/0080,060 SEPARABLE MODULATOR 49 2008
2009/0159,123 MULTIJUNCTION PHOTOVOLTAIC CELLS 16 2008
2010/0039,370 METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF 41 2009
2009/0225,395 INTERFEROMETRIC MODULATOR IN TRANSMISSION MODE 11 2009
2009/0201,566 DEVICE HAVING A CONDUCTIVE LIGHT ABSORBING MASK AND METHOD FOR FABRICATING SAME 32 2009
2009/0213,450 SUPPORT STRUCTURES FOR ELECTROMECHANICAL SYSTEMS AND METHODS OF FABRICATING THE SAME 33 2009
2009/0213,451 METHOD OF MANUFACTURING MEMS DEVICES PROVIDING AIR GAP CONTROL 29 2009
2009/0273,823 METHOD OF MANUFACTURING MEMS DEVICES PROVIDING AIR GAP CONTROL 27 2009
2009/0256,218 MEMS DEVICE HAVING A LAYER MOVABLE AT ASYMMETRIC RATES 28 2009
2009/0273,824 ELECTROMECHANICAL SYSTEM HAVING A DIELECTRIC MOVABLE MEMBRANE 22 2009
2009/0279,162 PHOTONIC MEMS AND STRUCTURES 35 2009
2010/0080,890 APPARATUS AND METHOD FOR REDUCING SLIPPAGE BETWEEN STRUCTURES IN AN INTERFEROMETRIC MODULATOR 27 2009
2010/0085,626 APPARATUS AND METHOD FOR REDUCING SLIPPAGE BETWEEN STRUCTURES IN AN INTERFEROMETRIC MODULATOR 25 2009
2010/0118,382 ANALOG INTERFEROMETRIC MODULATOR DEVICE WITH ELECTROSTATIC ACTUATION AND RELEASE 24 2010
7,852,544 Separable modulator 31 2010
2010/0236,624 INTERFEROMETRIC PHOTOVOLTAIC CELL 18 2010
2010/0309,572 PERIODIC DIMPLE ARRAY 9 2010
2011/0019,380 METHOD AND DEVICE FOR MODULATING LIGHT 27 2010
2011/0026,095 DEVICES AND METHODS FOR ENHANCING COLOR SHIFT OF INTERFEROMETRIC MODULATORS 9 2010
2011/0026,096 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 26 2010
2011/0038,027 METHOD AND DEVICE FOR MODULATING LIGHT WITH SEMICONDUCTOR SUBSTRATE 27 2010
2011/0080,632 METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF 18 2010
2011/0044,496 METHOD AND DEVICE FOR MULTISTATE INTERFEROMETRIC LIGHT MODULATION 15 2010
2011/0069,371 SEMI-TRANSPARENT/TRANSFLECTIVE LIGHTED INTERFEROMETRIC DEVICES 7 2010
2011/0116,156 DEVICE HAVING A CONDUCTIVE LIGHT ABSORBING MASK AND METHOD FOR FABRICATING SAME 13 2011
 
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2007/0077,525 Multi-level layer 44 2005
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6,466,354 Method and apparatus for interferometric modulation of light 253 2000
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