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United States of America Patent

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Nov 29, 2011
Grant Date
Sep 11, 2008
app pub date
Jun 20, 2007
filing date
Oct 22, 2003

priority date (Note)
Expired

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Abstract

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A calibration structure for probing devices.

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Patent Owner(s)

CASCADE MICROTECH, INC.

International Classification(s)

G01Q:SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIO....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Lesher, Timothy E	Portland, US	2	10

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United States of America Patent

11820877

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PATENT NO	8069491
APP PUB NO	20080218187A1
SERIAL NO	11820877
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
November 29, 2011	US,8069491,B2 US8069491B2	GRANTED PATENT AS SECOND PUBLICATION
September 11, 2008	US,20080218187,A1 US20080218187A1	FIRST PUBLISHED PATENT APPLICATION

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11820877

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