Slurry for slicing silicon ingot and method for slicing silicon ingot using the same

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United States of America Patent

PATENT NO 8075647
APP PUB NO 20100037880A1
SERIAL NO

12441467

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention is a slurry for slicing a silicon ingot, containing a basic material, such as an alkali metal hydroxide, abrasive powder and water, in which the slurry contains the basic material in an amount of from 2 to 6% by mass and glycerin in an amount of from 25 to 55% by mass, based on a total mass of components of the slurry excluding the abrasive powder.

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Patent Owner(s)

  • MITSUBISHI ELECTRIC CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kawasaki, Takafumi Chiyoda-ku, JP 27 409
Mimura, Seiichi Chiyoda-ku, JP 11 213
Nishida, Hirokazu Chiyoda-ku, JP 15 77
Yoshida, Yasuhiro Chiyoda-ku, JP 174 2061

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