Method for the production of photo-patterned carbon electronics
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United States of America Patent
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Dec 13, 2011
Grant Date -
Oct 29, 2009
app pub date -
Jul 6, 2009
filing date -
Apr 14, 2006
priority date (Note) -
Expired
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Abstract
A method for the manufacture of carbon based electrical components is herein presented. In the method a wafer substrate is provided upon which a first layer of carbon based semiconductor is deposited. The first layer of carbon based semiconductor is introduced to a first doping agent precursor and the first doping agent precursor and first layer of carbon based semiconductor are irradiated with light having a wavelength in the ultraviolet spectrum thereby selectively doping areas of the first layer of carbon based semiconductor.
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