Resin for hydrophobitizing resist surface, method for manufacturing the resin, and positive resist composition containing the resin
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United States of America Patent
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Dec 20, 2011
Grant Date -
Sep 24, 2009
app pub date -
Sep 9, 2008
filing date -
Mar 20, 2007
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Abstract
A resin to be added to a resist composition and locally distributed on a resist film surface to hydrophobitize the resist film surface includes a residual monomer in an amount of 1 mass % or less to the resin as a whole in terms of solid content.
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