System and method for a MEMS device
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United States of America Patent
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Dec 20, 2011
Grant Date -
Apr 17, 2008
app pub date -
Aug 20, 2007
filing date -
May 5, 1994
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformation portion having a flexible membrane held under tensile stress, and the control circuitry controls the deformation of the deformation portion. An optical portion may be formed on the flexible membrane which helps provides an optical response to movement of the deformation portion.
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