
US Patent No: 8,081,369
Number of patents in Portfolio can not be more than 2000
System and method for a MEMS device
Stats
-
Dec 20, 2011
Issued date -
Aug 20, 2007
filing date -
11/841,795
serial no -
In Force
status
Importance
Abstract
Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformation portion having a flexible membrane held under tensile stress, and the control circuitry controls the deformation of the deformation portion. An optical portion may be formed on the flexible membrane which helps provides an optical response to movement of the deformation portion.
First Claim
Related Publications
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
|
|
|||
| 4,441,791 Deformable mirror light modulator | 589 | 1982 | |
| 4,571,603 Deformable mirror electrostatic printer | 348 | 1984 | |
| 4,566,935 Spatial light modulator and method | 477 | 1984 | |
| 4,956,619 Spatial light modulator | 553 | 1988 | |
| 5,028,939 Spatial light modulator system | 369 | 1989 | |
| 4,954,789 Spatial light modulator | 526 | 1989 | |
| 5,018,256 Architecture and process for integrating DMD with control circuit substrates | 291 | 1990 | |
| 5,061,049 Spatial light modulator and method | 703 | 1990 | |
| 5,096,279 Spatial light modulator and method | 475 | 1990 | |
| 5,216,537 Architecture and process for integrating DMD with control circuit substrates | 364 | 1992 | |
| 5,212,582 Electrostatically controlled beam steering device and method | 336 | 1992 | |
| 5,818,095 High-yield spatial light modulator with light blocking layer | 287 | 1992 | |
| 5,285,196 Bistable DMD addressing method | 110 | 1992 | |
| 5,452,138 Deformable mirror device with integral color filter | 131 | 1993 | |
| 5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same | 381 | 1993 | |
| 5,444,566 Optimized electronic operation of digital micromirror devices | 346 | 1994 | |
| 5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices | 284 | 1994 | |
| 5,597,736 High-yield spatial light modulator with light blocking layer | 233 | 1995 | |
| 5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer | 380 | 1995 | |
|
|
|||
| 2003/0137,680 IMAGE PROCESSING APPARATUS, METHOD OF CONTROLLING SAME, AND IMAGE PROCESSING SYSTEM | 1998 | ||
| 2003/0137,680 IMAGE PROCESSING APPARATUS, METHOD OF CONTROLLING SAME, AND IMAGE PROCESSING SYSTEM | 1998 | ||
| 2003/0137,680 IMAGE PROCESSING APPARATUS, METHOD OF CONTROLLING SAME, AND IMAGE PROCESSING SYSTEM | 1998 | ||
|
|
|||
| 4,190,488 Etching method using noble gas halides | 70 | 1978 | |
| 4,560,435 Composite back-etch/lift-off stencil for proximity effect minimization | 104 | 1984 | |
| 5,326,430 Cooling microfan arrangements and process | 134 | 1993 | |
|
|
|||
| 5,835,255 Visible spectrum modulator arrays | 462 | 1994 | |
| 6,040,937 Interferometric modulation | 575 | 1996 | |
| 5,986,796 Visible spectrum modulator arrays | 447 | 1996 | |
|
|
|||
| 5,355,181 Apparatus for direct display of an image on the retina of the eye using a scanning laser | 90 | 1991 | |
| 5,262,667 Semiconductor device for optical pick-up | 7 | 1991 | |
| 5,422,310 Method of forming interconnection in semiconductor device | 52 | 1994 | |
|
|
|||
| 4,672,254 Surface acoustic wave devices and method of manufacture thereof | 80 | 1985 | |
| 5,022,745 Electrostatically deformable single crystal dielectrically coated mirror | 333 | 1989 | |
|
|
|||
| 4,857,978 Solid state light modulator incorporating metallized gel and method of metallization | 90 | 1987 | |
| 4,900,136 Method of metallizing silica-containing gel and solid state light modulator incorporating the metallized gel | 140 | 1988 | |
|
|
|||
| 4,822,993 Low-cost, substantially cross-talk free high spatial resolution 2-D bistable light modulator | 29 | 1988 | |
| 5,471,341 Membrane light modulating systems | 156 | 1993 | |
|
|
|||
| 4,403,248 Display device with deformable reflective medium | 322 | 1981 | |
| 4,459,182 Method of manufacturing a display device | 232 | 1983 | |
|
|
|||
| 5,561,523 Electrically tunable fabry-perot interferometer produced by surface micromechanical techniques for use in optical material analysis | 112 | 1995 | |
| 5,646,729 Single-channel gas concentration measurement method and apparatus using a short-resonator Fabry-Perot interferometer | 113 | 1995 | |
|
|
|||
| 5,381,232 Fabry-perot with device mirrors including a dielectric coating outside the resonant cavity | 200 | 1993 | |
|
|
|||
| 5,500,761 Micromechanical modulator | 324 | 1994 | |
|
|
|||
| 4,498,953 Etching techniques | 130 | 1983 | |
|
|
|||
| 5,206,632 Actuating circuit for a liquid crystal display | 33 | 1990 | |
|
|
|||
| 4,880,493 Electronic-carrier-controlled photochemical etching process in semiconductor device fabrication | 55 | 1988 | |
|
|
|||
| 4,497,974 Realization of a thin film solar cell with a detached reflector | 74 | 1982 | |
|
|
|||
| 4,956,213 Information recording medium | 10 | 1989 | |
|
|
|||
| 5,454,904 Micromachining methods for making micromechanical moving structures including multiple contact switching system | 107 | 1994 | |
|
|
|||
| 5,401,983 Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices | 250 | 1993 | |
|
|
|||
| 4,952,034 Liquid crystal projection display | 23 | 1989 | |
|
|
|||
| 4,392,711 Process and apparatus for rendering visible charge images | 119 | 1981 | |
|
|
|||
| 5,559,358 Opto-electro-mechanical device or filter, process for making, and sensors made therefrom | 346 | 1994 | |
|
|
|||
| 4,425,572 Thin film transistor | 49 | 1981 | |
|
|
|||
| 4,441,789 Resonance absorber | 88 | 1981 | |
|
|
|||
| 4,982,184 Electrocrystallochromic display and element | 339 | 1989 | |
|
|
|||
| 4,973,131 Modulator mirror | 73 | 1989 | |
|
|
|||
| 5,114,226 3-Dimensional vision system utilizing coherent optical detection | 70 | 1990 | |
|
|
|||
| 5,638,084 Lighting-independent color video display | 205 | 1996 | |
|
|
|||
| 6,381,022 Light modulating device | 108 | 2000 | |
|
|
|||
| 5,170,283 Silicon spatial light modulator | 153 | 1991 | |
|
|
|||
| 5,337,191 Broad band pass filter including metal layers and dielectric layers of alternating refractive index | 83 | 1993 | |
|
|
|||
| 5,198,644 System for display of prices and related method | 198 | 1992 | |
|
|
|||
| 4,786,128 Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction | 274 | 1986 | |
|
|
|||
| 4,705,361 Spatial light modulator | 84 | 1985 | |
|
|
|||
| 4,779,959 Liquid crystal electro-optic modulator in a fabry-perot interferometer | 82 | 1987 | |
|
|
|||
| 4,859,060 Variable interferometric device and a process for the production of the same | 361 | 1986 | |
|
|
|||
| 4,925,259 Multilayer optical dielectric coating | 84 | 1988 | |
|
|
|||
| 4,655,554 Spatial light modulator having a capacitively coupled photoconductor | 84 | 1985 | |
|
|
|||
| 4,896,033 Array of optically-controlled elements for the diffusion of electromagnetic energy | 32 | 1989 | |
|
|
|||
| 4,408,181 Document data filing/retrieval system | 50 | 1980 | |
|
|
|||
| 4,421,381 Mechanical vibrating element | 175 | 1981 | |
|
|
|||
| 5,091,983 Optical modulation apparatus and measurement method | 135 | 1989 | |
| 5,062,689 Electrostatically actuatable light modulating device | 143 | 1990 | |
| 5,142,414 Electrically actuatable temporal tristimulus-color device | 255 | 1991 | |
| 5,315,370 Interferometric modulator for optical signal processing | 120 | 1991 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Jun 20, 2015 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jun 20, 2019 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jun 20, 2023 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 3.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |