Temperature extraction from a pressure sensor
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United States of America Patent
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Dec 27, 2011
Grant Date -
N/A
app pub date -
Jan 28, 2009
filing date -
Jan 28, 2008
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Circuits, methods, and systems to compensate pressure sensor readings for changes in temperature. An example measures temperature in a field-effect-transistor-based pressure sensor or micro-electromechanical system by measuring the device's threshold voltage. This threshold voltage is linearly dependent on the temperature but shows negligible sensitivity to mechanical stress. This allows the pressure sensor's temperature to be determined in an environment of changing pressure. Once the temperature is known, the pressure sensor's pressure readings can be adjusted. The threshold voltage can be extracted by measuring the turn-on transistor characteristic of the device and using device models. Alternately, the threshold voltage can be extracted using threshold voltage extraction circuits.
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